Equipment List

Equipment Name Contact Location Technique(s)
4155c Semiconductor Parameter Analyzer (Agilent), used with Lake Shore and custom probe station frao@illinois.edu 326 MRL
6" Tube oxidation furnace frao@illinois.edu 328 MRL
Acid Fume Hood xlwang84@illinois.edu 359 MRL
AJA ATC2000 Sputter Coater 1 taoshang@illinois.edu 336 MRL
AJA Orion 3 Sputter Coater 2 taoshang@illinois.edu 326 MRL
AJA Orion-8 Magnetron Sputtering System frao@illinois.edu 336 MRL
Allied MultiPrep System cqchen@illinois.edu B56 MRL
Allied TechCut 4™ Precision Low Speed Saw cqchen@illinois.edu B56 MRL
Asylum Research Cypher kawalsh@illinois.edu 0014 Supercon
Asylum Research Cypher STM kawalsh@illinois.edu 0014 Supercon
Asylum Research MFP-3D AFM kawalsh@illinois.edu 0014 Supercon
Au-Pd Sputter Coater - Emitech K575 cqchen@illinois.edu 0018 Supercon
Au-Pd Sputter Coater - Emscope SC 500 cqchen@illinois.edu 0021 Supercon
Ball Bonder (25 um Gold wire, K&S 4524A) frao@illinois.edu 326 MRL
Bench Top Probe Station (Custom) frao@illinois.edu 326 MRL
Box furnace – max temperature 900°C frao@illinois.edu 328 MRL
Cameca ims 5f tspila@illinois.edu B01 MRL
Commonwealth Scientific Ion Milling & Thermal Evaporator System frao@illinois.edu 334 MRL
Cressington Carbon Coater 108carbon/A cqchen@illinois.edu B59 MRL
CVD Graphene/Carbon Nanotube Growth Furnace – Max Temp. 1050°C frao@illinois.edu 322 MRL
Discovery 2500 Differential Scanning Calorimeter (DSC) tspila@illinois.edu 133 MRL
FEI Helios 600i Dual Beam SEM/FIB hhzhou@illinois.edu B58 MRL
FEI Strata Dual Beam 235 SEM/FIB hhzhou@illinois.edu B62 MRL
FEI Themis Z Advanced Probe Aberration Corrected Analytical TEM/STEM mabon@illinois.edu B66 MRL
FEI Vitrobot Mark III wswiech@illinois.edu MRL B59
Fischione 1020 plasma cleaner cqchen@illinois.edu B70 MRL
Gaertner L116C soares@illinois.edu 248 MRL
Gatan 656 Dimple Grinder cqchen@illinois.edu B56 MRL
Gatan 656 Disc Grinder System cqchen@illinois.edu B56 MRL
GATAN Cryo Precision Ion Polishing System (Cryo-PIPS) cqchen@illinois.edu B59 MRL