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Equipment List
Tube furnace - 6 inch
Tube furnace - 6 inch
Features:
Maximum temperature: 1100
o
C with 3 temperature zones.
Tube type and size: quartz tube, 6-inch outer diameter.
Gas: Nitrogen, Argon, or Oxygen. 0-10 SLPM.
6" Tube Oxidation Furnace
Location
328 MRL
Related Research Techniques
Diffusion / Annealing Furnaces
Furnace Equipment
Related Research Cores
Micro/Nano Fabrication and Cleanroom
Contact
Lon Alan Westfall
Research Engineer
Primary Contact
Gregory MacDougall
Research Associate Professor, MRL