Transmission and Scanning Transmission Electron Microscopy (TEM/STEM)

Determine the microstructure of materials such as grain size, defect density and type, and dislocation distribution; study the local microstructure including heterointerface and individual nanostructures; examine crystalline and amorphous structures; determine the composition of materials from micrometer level down to atomic level. Six instruments with complementary capabilities include atomic resolution (0.19 nm) TEM and analytical scanning TEM with 0.2 nm beam for atomic number (Z-contrast) imaging, EDS, EELS and nanodiffraction. Traditional sample preparation such as ion millers, Cryo TEM with cryomicrotomy, vitreous ice sample preparation and cryo-transfer are also available.

Comparison of TEM systems available in the MRL shared research facilities:

	JEOL 1400 TEM	JEOL 2010 TEM	JEOL 2100 TEM	Hitachi H9500 DETEM	ThermoFisher Glacios cryo-TEM	ThermoFisher Talos F200X G2 S/TEM	ThermoFisher Themis Z S/TEM
Electron source	LaB₆	LaB₆	LaB₆	LaB₆	Schottky X-FEG	Schottky X-FEG	Schottky X-FEG
Electron acceleration	40-120 kV	80, 100, 120, 200 kV	80, 100, 120, 200 kV	100, 200, 300 kV	200 kV	80, 100, 200 kV	60, 80, 200, 300 kV, electron energy monochromator
Resolution	0.38 nm (point), 0.2 nm (lattice imaging)	0.194 nm (point), 0.14 nm lattice	0.27 nm (point), 0.14 nm lattice.	0.18 nm (point), 0.10 nm (lattice)	Information limit 0.23 nm	0.10 nm (TEM line), 0.16 nm STEM	STEM: from <60pm at 300kV to <120pm at 60 kV
Cameras and detectors	AMT Nanosprint (4096 x 3008, 6.8 mm pixel, CMOS).	Gatan Orius SC1000 CCD (4008 x 2672, 9 mm pixel CCD).	Gatan UltraScan (2048 x 2048, 14 mm pixel CCD).	- Gatan K2 IS direct electron detector (3840 x 3712, 5 mm pixel CMOS). - Gatan 4Mpixel UltraScan GIF CCD (7.4 mm pixel).	- Ceta D (4,096 x 4,096, 14 μm pixel CMOS. - Falcon4 direct electron detector (4096 x 4096, 14 mm pixel CMOS).	- Ceta 16M (4096 x 4096, 14 mm pixel CMOS) with speed enhancement. - HAADF, BF, DF, Panther STEM detectors. - EMPAD detector (128x128, 150 mm pixel CMOS)	- Ceta 16M (4096 x 4096, 14 mm pixel CMOS). - HAADF, FEI-triple BF/DF detector, Gatan BF/DF detector. - EMPAD detector (128x128, 150 mm pixel CMOS)
Stage and Holders	- High tilt stage. - Dual-axis holder for tomography	-Single tilt and double tilt holders. - PI 95 PicoIndenter.	-Single tilt (high tilt) and double tilt holders. -Cryo transfer, double tilt, LN₂ stage. - 900^oC double tilt holder.	- Single and double tilt holders. - In-situ gas injection holder. - Liquid cell electrochemistry holder.	Computerized 4-axes specimen stage tilt (+/- 70^o alpha tilt). -Specimen autoloader with 12-grid holder/cassette.	-Piezo-enhanced CompuStage X, Y. -Single tilt and high visibility double tilt holders. -Tomography holder. -Protochips Liquid cell electrochemistry holder.	-Piezo-enhanced CompuStage X, Y, Z. - Single tilt holder, standard double tilt, and high visibility double tilt holders. - Tomography holder. - Hummingbird Air-free transfer holder, - Protochips MEMS heating holder
Additional features	-Large field of view. -Serial EM software		Large pole piece gap	- Dynamical environmental reactions. - Nanosecond and femtosecond lasers.	-Cryo-EM. -Single particle analysis. -Micro-ED. -Tomography. BSL2 lab. -Volta Phase Plate.	-Lorents lens. -TEM Scripting. - Low dose mode.	-5^th order probe aberration correction. -Constant power lenses. - Free Lens Control - TEM Scripting
Analytical				Gatan GIF Quantum ER EELS energy resolution 2.0 eV		Super-X SDD EDS (136 eV resolution)	- Super-X SDD EDS (136 eV resolution). - Gatan GIF with dual EELS (150 meV resolution in mono mode)

TEM/STEM Equipment

Equipment Name	Contact	Location
Equipment Name	Contact	Location
ThermoFisher Glacios Cryo-TEM	Kristen M Flatt flatt1 Ying He yinghe2	0026 Supercon	The ThermoFisher Glacios is a high-end, 200kV X-FEG cryogenic transmission electron microscope (CryoTEM) optimized for Single Particle Analysis (SPA), electron tomography, and micro-electron diffraction (microED). The Glacios is equipped with industry-leading Autoloader grid manipulation technology controlled by the ThermoFisher EPU software, allowing users to assess sample quality in a contamination-free environment. The microscope is also equipped with a Volta Phase Plate and Falcon4 Direct Electron Detector, making the Glacios both a stand-alone system for high-resolution SPA data acquisition, and a tool for pre-optimization of sample quality before transfer to a Krios CryoTEM system. See More Details
FEI Themis Z Advanced Probe Aberration Corrected Analytical TEM/STEM	Changqiang Chen cqchen Honghui Zhou hhzhou	B66 MRL	The FEI Themis Z is and advanced analytical scanning/transmission electron microscope (STEM/TEM) from Thermo Fisher Scientific Company that operates between the electron energy of 60 to 300 keV with a Schottky electron emitter, an electron energy monochromator, and a 5th order probe spherical aberration corrector. See More Details
ThermoFisher Scientific Talos F200X G2 Scanning Transmission Electron Microscope (S/TEM)	Changqiang Chen cqchen Honghui Zhou hhzhou	B70C MRL	The Talos F200X G2 is a 200 kV FEG Scanning Transmission Electron Microscope (S/TEM) that combines outstanding quality in high-resolution STEM and TEM imaging with high throughput EDS signal detection and 3D chemical characterization with compositional mapping. It is designed for fast, precise and quantitative characterization of nano-materials. It accelerates nano-analysis of materials based on higher data quality, faster acquisition, and simplified and automated operation. The system’s Constant-Power™ X-TWIN lens delivers outstanding optical performance to help ensure an optimal balance of contrast and resolution. See More Details
JEOL 2010 LAB6 TEM	Jade Wang zyw Changqiang Chen cqchen	0017 Supercon	The 2010LaB6 is a conventional TEM. It is optimized for BF/DF imaging, diffraction and high sample tilts. See More Details
JEOL 2100 TEM	Jade Wang zyw Changqiang Chen cqchen Kristen M Flatt flatt1	0011 Supercon	The JEOL 2100 is a conventional TEM with large pole piece gap. It is optimized for BF/DF imaging, diffraction and high sample tilts. Also capable of imaging ultrathin biological tissue sections. It operates at 200kV. The 2100 is equipped with a combined video rate/slow scan camera for real time imaging and final image recording. It has a low-dose mode. A high tilt is available with +/-70 degrees using a special tip for the single tilt holder. Cryo transfer stage, double tilt heating, and liquid N2 stages are available. See More Details
Hitachi H-9500 Dynamic Environmental TEM	Changqiang Chen cqchen Honghui Zhou hhzhou	B62A MRL	The H-9500 is a high resolution 100-300 kV ETEM with a LaB6 electron gun equipped for study of dynamic material reactions down to the atomic scale. See More Details
JEOL JEM-1400 TEM	Kristen M Flatt flatt1 Jade Wang zyw	0021 Supercon	The JEM-1400 uses a LaB₆ filament electron gun with acceleration up to 120 kV and is also capable of lowering it down to 40 kV if required (in order to minimize sample radiation where necessary). The tool is capable of a point-to-point resolution down to 0.38 nm and lattice imaging down to 0.2 nm. See More Details