ThermoFisher Axia ChemiSEM

The Axia ChemiSEM is a new generation of scanning electron microscope, designed to provide the most efficient SEM-EDS user experience possible. Low-vacuum mode will provide several advantages when dealing with non-conductive samples; not only does it enable charge-free imaging, but it also allows an increase in the material contrast and the use of higher beam currents to perform chemical analyses.

Some of the instrument features are:

  • Thermal emission W gun
  • Alignment-free operation
  • Live Quantitative Elemental Mapping: A single scan generator controls both SE/BSE and X-ray acquisition, creating perfectly aligned EDS and imagery data
  • Thermo Scientific Nav-Cam™ Navigation Camera
  • Accelerating voltage range: 200 V – 30 k
  • Magnification: 5 to 1,000,000×
  • Integrated current measurement: up to 2 μA, continuously adjustable beam current range
  • Detectors:
    • TrueSight X EDS detector. Solid angle 13 mSr, resolution 129 eV
    • ETD: Everhart-Thornley SE detector
    • Low-vacuum SE detector (LVD), standard on LoVac model, with adjustable pressure up to 150 Pa
    • Motorized retractable backscattered electron detector that offers two different segments for more tunable contrast
  • Set of 3 apertures 200 um, 3 mm diameter
  • Electron beam resolution:
    • High-vacuum imaging
      • 3.0 nm @ 30 kV (SE)
      • 8.0 nm @ 3 kV (SE)
    • Low-vacuum imaging
      • 3.0 nm @ 30 kV (SE)
      • 4.0 nm @ 30 kV (BSE)
      • 10 nm @ 3 kV (SE)
  • 280 mm inner width chamber
  • Stage:
    • XY: 120x120 mm Eucentric Stage
    • Tilt: -15 to +90 degrees
    • Rotation: n x 360°
    • With ZTR axes removed:
      • Max. sample height: 128 mm
      • Max. sample weight: 10 kg
  • NT7 Holder: hosts up to 7 standard stubs (ø 12 mm), and does not require tools to mount a sample
  • CCD IR camera for viewing sample in chamber
  • 24'' Widescreen LCD Monitor
  • Thermo Scientific Maps™ Software
  • Manual user interface
  • Remote control / imaging.
  • Workstation with Windows 10

Contact

Research Scientist