ThermoFisher Axia ChemiSEM
The Axia ChemiSEM is a new generation of scanning electron microscope, designed to provide the most efficient SEM-EDS user experience possible. Low-vacuum mode will provide several advantages when dealing with non-conductive samples; not only does it enable charge-free imaging, but it also allows an increase in the material contrast and the use of higher beam currents to perform chemical analyses.
Some of the instrument features are:
- Thermal emission W gun
- Alignment-free operation
- Live Quantitative Elemental Mapping: A single scan generator controls both SE/BSE and X-ray acquisition, creating perfectly aligned EDS and imagery data
- Thermo Scientific Nav-Cam™ Navigation Camera
- Accelerating voltage range: 200 V – 30 k
- Magnification: 5 to 1,000,000×
- Integrated current measurement: up to 2 μA, continuously adjustable beam current range
- Detectors:
- TrueSight X EDS detector. Solid angle 13 mSr, resolution 129 eV
- ETD: Everhart-Thornley SE detector
- Low-vacuum SE detector (LVD), standard on LoVac model, with adjustable pressure up to 150 Pa
- Motorized retractable backscattered electron detector that offers two different segments for more tunable contrast
- Set of 3 apertures 200 um, 3 mm diameter
- Electron beam resolution:
- High-vacuum imaging
- 3.0 nm @ 30 kV (SE)
- 8.0 nm @ 3 kV (SE)
- Low-vacuum imaging
- 3.0 nm @ 30 kV (SE)
- 4.0 nm @ 30 kV (BSE)
- 10 nm @ 3 kV (SE)
- High-vacuum imaging
- 280 mm inner width chamber
- Stage:
- XY: 120x120 mm Eucentric Stage
- Tilt: -15 to +90 degrees
- Rotation: n x 360°
- With ZTR axes removed:
- Max. sample height: 128 mm
- Max. sample weight: 10 kg
- NT7 Holder: hosts up to 7 standard stubs (ø 12 mm), and does not require tools to mount a sample
- CCD IR camera for viewing sample in chamber
- 24'' Widescreen LCD Monitor
- Thermo Scientific Maps™ Software
- Manual user interface
- Remote control / imaging.
- Workstation with Windows 10
- Related Research Techniques
- Related Research Cores