ThermoFisher Axia ChemiSEM

The Axia ChemiSEM is a new generation of scanning electron microscope, designed to provide the most efficient SEM-EDS user experience possible. Low-vacuum mode will provide several advantages when dealing with non-conductive samples; not only does it enable charge-free imaging, but it also allows an increase in the material contrast and the use of higher beam currents to perform chemical analyses.

Some of the instrument features are:

• Thermal emission W gun
• Alignment-free operation
• Live Quantitative Elemental Mapping: A single scan generator controls both SE/BSE and X-ray acquisition, creating perfectly aligned EDS and imagery data
• Thermo Scientific Nav-Cam™ Navigation Camera
• Accelerating voltage range: 200 V – 30 k
• Magnification: 5 to 1,000,000×
• Integrated current measurement: up to 2 μA, continuously adjustable beam current range
• Detectors:
  • TrueSight X EDS detector. Solid angle 13 mSr, resolution 129 eV
  • ETD: Everhart-Thornley SE detector
  • Low-vacuum SE detector (LVD), standard on LoVac model, with adjustable pressure up to 150 Pa
  • Motorized retractable backscattered electron detector that offers two different segments for more tunable contrast
• Set of 3 apertures 200 um, 3 mm diameter
• Electron beam resolution:
  • High-vacuum imaging
    • 3.0 nm @ 30 kV (SE)
    • 8.0 nm @ 3 kV (SE)
  • Low-vacuum imaging
    • 3.0 nm @ 30 kV (SE)
    • 4.0 nm @ 30 kV (BSE)
    • 10 nm @ 3 kV (SE)
• 280 mm inner width chamber, 10 mm analytical working distance.
• Stage:

• • 5-axes motorized stage, repeatability < 5 microns.
  • XY: 120x120 mm Eucentric Stage (maximum sample lateral size: 138 mm)
  • Tilt: -15 to +90 degrees
  • Rotation: n x 360°
  • Maximum sample height: 72 mm to analytical working distance (10 mm), no sample holder; otherwise, with the ZRT axes removed, clearance is 128 mm to analytical working distance (10 mm).
  • Maximum sample weight: 500 g in any stage position; other, with the ZRT axes removed, up to 10 kg.

• NT7 Holder: hosts up to 7 standard stubs (ø 12 mm), and does not require tools to mount a sample
• CCD IR camera for viewing sample in chamber
• Image processor: dwell time 50 ns - 25 ms per pixel, up to 6144x4096 pixels, file types TIFF (8, 16 or 24 bit), JPEG or BMP.
• 24'' Widescreen LCD Monitor
• Thermo Scientific Maps™ Software
• Manual user interface
• Remote control / imaging.
• Workstation with Windows 10