UV/Ozone Cleaner

It is a very simple cleaning technique used in air at ambient temperatures.  The tool can accommodate a full size silicon wafer which can be placed close to the UV source to remove unwanted organic contamination.  It is operated in a fume hood due to ozone production and with the door closed due to the UV light.  There is one power switch which can be turned on as long as the user needs for sample cleaning but must be manually turned off when finished.