Illinois MRL
Materials
Research Laboratory
Materials
Research Laboratory
At Illinois
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Facilities
Research Cores
Electron Microscopy
Scanning Electron Microscopy (SEM)
Focused Ion Beam (FIB)
Transmission and Scanning Transmission Electron Microscopy (TEM/STEM)
EM Support Instruments
Laser and Spectroscopy
Contact Angle Goniometry
Ellipsometry
Light Sources
Spectroscopy
Microscopy
Micro/Nano Fabrication and Cleanroom
Deposition Tools
Dry Etching
Wet Processing
Lithography
Diffusion / Annealing Furnaces
Bonding Stations
Additional Micro/Nanofabrication Resources
Probe Stations
MRL Microfab Clean Room
Scanning Probe Microscopy
Atomic Force Microscopy (AFM)
Scanning Tunneling Microscopy (STM)
Nanoindentation
Surface Analysis
Auger Electron Spectroscopy
Accelerator-based Techniques
Secondary Ion Mass Spectrometry
X-Ray Photoelectron Spectroscopy
Surface Profilometry
Thermal Analysis & Soft Materials Characterization
Materials Properties Measurement
X-Ray Analysis
X-Ray Diffraction (XRD) and Scattering
Data Analysis Software Packages
Bio Services
Mask Fabrication Services
MRL Photomask Services Online Payments
Equipment coming soon to MRL
Equipment List
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University of Illinois (All Campuses) Users
Non-University of Illinois Academic and Government Agency Users
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BEAP Training Instructions
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Information Technology
ESCO Project Updates
Facilities Lab Closures
Temporary MicroFab Cleanroom and Instruments Relocation
Facilities Updates
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Mobile Menu Toggle
Facilities
Research Cores
Electron Microscopy
Scanning Electron Microscopy (SEM)
Focused Ion Beam (FIB)
Transmission and Scanning Transmission Electron Microscopy (TEM/STEM)
EM Support Instruments
Laser and Spectroscopy
Contact Angle Goniometry
Ellipsometry
Light Sources
Spectroscopy
Microscopy
Micro/Nano Fabrication and Cleanroom
Deposition Tools
Dry Etching
Wet Processing
Lithography
Diffusion / Annealing Furnaces
Bonding Stations
Probe Stations
Additional Micro/Nanofabrication Resources
MRL Microfab Clean Room
Scanning Probe Microscopy
Atomic Force Microscopy (AFM)
Scanning Tunneling Microscopy (STM)
Nanoindentation
Surface Analysis
Auger Electron Spectroscopy
Accelerator-based Techniques
Secondary Ion Mass Spectrometry
X-Ray Photoelectron Spectroscopy
Surface Profilometry
Thermal Analysis & Soft Materials Characterization
Materials Properties Measurement
X-Ray Analysis
X-Ray Diffraction (XRD) and Scattering
Data Analysis Software Packages
Bio Services
Mask Fabrication Services
MRL Photomask Services Online Payments
Equipment coming soon to MRL
Equipment List
Become a User
University of Illinois (All Campuses) Users
Non-University of Illinois Academic and Government Agency Users
Business or Industrial Users (Includes UI Enterprise Works)
Central Research Facility Use Acknowledgement
Usage Rates
Schedule an Instrument
Facility Guide
Submit Requisition
Grant Proposal Instructions
Standard Acknowledgement of Support
Building Emergency Contacts
Key Requests
Meeting Room Reservations
BEAP Training Instructions
Resources
Storeroom
Machine Shop
Information Technology
ESCO Project Updates
Facilities Lab Closures
Temporary MicroFab Cleanroom and Instruments Relocation
Facilities Updates
Research
Research Programs
Start Your Research
Grant Proposal Instructions
Safety
Safety Contact
Safety Training
Laser Safety Guides
Safety Newsletters
Safety Services for MRL Groups
BEAP Training Instructions
Directory
Faculty
All Staff
MRL Staff Scientists
Service Areas and Offices
Contact Us
About Us
Events
Current Calendar
Conferences and Workshops
News
My.Mrl
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