Mueller matrix ellipsometer J.A. Woollam RC 2

Features:

• Dual-rotating achromatic compensator design
• Advanced light source
• Multichannel spectrometer

RC2 is a near-universal solution for the diverse applications of spectroscopic ellipsometry and Mueller matrix ellipsometry.

The RC2 ellipsometer enables the collection of all 16 elements of the Mueller matrix. This permits a full characterization of the sample's optical properties, including depolarization. Mueller matrix spectroscopic ellipsometry also allows for the characterization of highly anisotropic materials and nanostructured samples.

Its multichannel detector design and synchronous compensators operation minimizes data acquisition time, while increasing the accuracy of collected data. Using a combination of a silicon CCD and an InGaAs diode array, this ellipsometer collects a full spectrum from 193 nm to 1690 nm in a fraction of a second.

Our RC2 is equipped with a large sample stage for samples up to 6 inches in diameter, fully motorized for mapping measurements. Spot size on the sample can be reduced to 200 µm with the help of focusing optics, to achieve better spatial mapping resolution.

We also have an environmental cell, which can control the temperature of the sample from 5°C to 600°C.

Wavelength range: 193 nm to 1690 nm; Angle of incidence: 45° to 90°; Temperature: 5°C to 600°C

Example of maps of a thin oxide film on Si