Block I logo
University of Illinois Urbana-Champaign
Facilities Updates
My.MRL
The Grainger College of Engineering
Materials Research Laboratory
Search
Menu
Search
About
About
Directions and Parking
Quick Link to Become a User
Facilities
Facilities
Research Cores
Electron Microscopy (EM)
EM Support Instruments
Focused Ion Beam (FIB) FIB/SEM DualBeam Systems
Scanning Electron Microscopy (SEM)
Transmission and Scanning Transmission Electron Microscopy (TEM/STEM)
Cryo-EM (Electron Microscopy)
Laser and Spectroscopy
Contact Angle Goniometry
Cryostats
Ellipsometry
Light Sources
Microscopy
Spectroscopy
Micro/Nano Fabrication and Cleanroom
Additional Micro/Nanofabrication Resources
Bonding Stations
Deposition Tools
Dry Etching
Furnace Equipment
Lithography
MRL Microfab Clean Room
Probe Stations
Wet Processing
Physical Properties Measurement
Electrical transport
Heat Capacity
Magnetization
Thermal Transport
Scanning Probe Microscopy
Atomic Force Microscopy (AFM)
Nanoindentation
Scanning Probe Optical Spectroscopy
Surface Analysis
Accelerator-based Techniques
Atom Probe Tomography
Secondary Ion Mass Spectrometry
Surface Profilometry
X-Ray Photoelectron Spectroscopy
Thermal Analysis and Soft Materials Characterization
Center for Excellence in Soft Materials
X-Ray Analysis
X-Ray Data Analysis Software Packages
X-Ray Diffraction (XRD) and Scattering
AMTEL (Advanced Materials Testing and Evaluation Laboratory)
MRL Battery Fabrication and Characterization Lab
MRL Carver BioMaker Laboratory
Bio Services
Photomask Fabrication
Facilities News
Equipment List
Become a User
MRL Research Facilities Access Options
Step-by-Step Guide to Become a User
University of Illinois (All Campuses) Users
Non-University of Illinois Academic and Government Agency Users
Business or Industrial Users
Enterprise Works Affiliates
MRL for Courses
Central Research Facilities Use Acknowledgement
MRL Orientation
Usage Rates
Schedule an instrument
Facility Guide
Resources
Storeroom
Machine Shop
Information Technology
Research
Start your MRL research here.
Start Here
Research
Proposal Development & Grant Management
Illinois Quantum Information Science and Technology Center (IQUIST)
Illinois Materials Research Science and Engineering Center (MRSEC)
BP International Centre for Advanced Materials (BP-ICAM)
Energy & Biosciences Institute (EBI)
DOE Energy Frontier Research Centers (EFRCs)
Center for Hypersonics and Entry Systems Studies (CHESS)
News
News
E-newsletters
MRL Awards, Employment, and Funding
Events
Events
Current Calendar
Conferences and Workshops
Advanced Materials Characterization 2024
Advanced Materials Characterization 2025
Registration
Program
Sponsors
Travel
Safety
Safety
Building Emergency Action Plan (BEAP)
Safety Services for MRL Groups
Directory
Directory
Faculty
Staff
Research Affiliates
Service Areas and Offices
Contact Us
Facilities Updates
My.MRL
Home
Facilities
Equipment List
High Temperature CM furnace – max temperature 1600°C to 1700°C
In This Section
Facilities
Research Cores
Electron Microscopy (EM)
EM Support Instruments
Focused Ion Beam (FIB) FIB/SEM DualBeam Systems
Scanning Electron Microscopy (SEM)
Transmission and Scanning Transmission Electron Microscopy (TEM/STEM)
Cryo-EM (Electron Microscopy)
Laser and Spectroscopy
Contact Angle Goniometry
Cryostats
Ellipsometry
Light Sources
Microscopy
Spectroscopy
Micro/Nano Fabrication and Cleanroom
Additional Micro/Nanofabrication Resources
Bonding Stations
Deposition Tools
Dry Etching
Furnace Equipment
Lithography
MRL Microfab Clean Room
Probe Stations
Wet Processing
Physical Properties Measurement
Electrical transport
Heat Capacity
Magnetization
Thermal Transport
Scanning Probe Microscopy
Atomic Force Microscopy (AFM)
Nanoindentation
Scanning Probe Optical Spectroscopy
Surface Analysis
Accelerator-based Techniques
Atom Probe Tomography
Secondary Ion Mass Spectrometry
Surface Profilometry
X-Ray Photoelectron Spectroscopy
Thermal Analysis and Soft Materials Characterization
Center for Excellence in Soft Materials
X-Ray Analysis
X-Ray Data Analysis Software Packages
X-Ray Diffraction (XRD) and Scattering
AMTEL (Advanced Materials Testing and Evaluation Laboratory)
MRL Battery Fabrication and Characterization Lab
MRL Carver BioMaker Laboratory
Bio Services
Photomask Fabrication
Facilities News
Equipment List
Become a User
MRL Research Facilities Access Options
Step-by-Step Guide to Become a User
University of Illinois (All Campuses) Users
Non-University of Illinois Academic and Government Agency Users
Business or Industrial Users
Enterprise Works Affiliates
MRL for Courses
Central Research Facilities Use Acknowledgement
MRL Orientation
Usage Rates
Schedule an instrument
Facility Guide
Resources
Storeroom
Machine Shop
Information Technology
High Temperature CM furnace – max temperature 1600°C to 1700°C
Features:
Maximum temperature: 1600
o
C to 1700°C depending on run times.
Tube type and size: ceramic tube, 2-inch outer diameter.
Gas: Nitrogen, Argon, or Oxygen. 0-10 SLPM.
Location
328 MRL
Related Research Techniques
Diffusion / Annealing Furnaces
Furnace Equipment
Related Research Cores
Micro/Nano Fabrication and Cleanroom
Contact
Lon Alan Westfall
Research Engineer
Primary Contact
Gregory MacDougall
Research Associate Professor, MRL