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In This Section
  • Facilities Overview
  • Research Cores
    • Electron Microscopy (EM)
      • EM Support Instruments
      • Focused Ion Beam (FIB) FIB/SEM DualBeam Systems
      • Scanning Electron Microscopy (SEM)
      • Transmission and Scanning Transmission Electron Microscopy (TEM/STEM)
    • Cryo-EM (Electron Microscopy)
    • Laser and Spectroscopy
      • Contact Angle Goniometry
      • Cryostats
      • Ellipsometry
      • Light Sources
      • Microscopy
      • Spectroscopy
    • Micro/Nano Fabrication and Cleanroom
      • Additional Micro/Nanofabrication Resources
      • Bonding Stations
      • Deposition Tools
      • Dry Etching
      • Furnace Equipment
      • Lithography
      • MRL Microfab Clean Room
      • Probe Stations
      • Wet Processing
    • Physical Properties Measurement
      • Electrical transport
      • Heat Capacity
      • Magnetization
      • Thermal Transport
    • Scanning Probe Microscopy
      • Atomic Force Microscopy (AFM)
      • Nanoindentation
      • Scanning Probe Optical Spectroscopy
    • Surface Analysis
      • Accelerator-based Techniques
      • Atom Probe Tomography
      • Secondary Ion Mass Spectrometry
      • Surface Profilometry
      • X-Ray Photoelectron Spectroscopy
    • Thermal Analysis and Soft Materials Characterization
      • Center for Excellence in Soft Materials
    • X-Ray Analysis
      • X-Ray Data Analysis Software Packages
      • X-Ray Diffraction (XRD) and Scattering
    • AMTEL (Advanced Materials Testing and Evaluation Laboratory)
    • MRL Battery Fabrication and Characterization Lab
    • MRL Carver BioMaker Laboratory
    • Bio Services
    • Photomask Fabrication
    • Facilities News
  • Equipment List
  • Become a User
    • MRL Research Facilities Access Options
    • Step-by-Step Guide to Become a User
    • University of Illinois (All Campuses) Users
    • Non-University of Illinois Academic and Government Agency Users
    • Business or Industrial Users
    • Enterprise Works Affiliates
    • MRL for Courses
    • Central Research Facilities Use Acknowledgement
  • MRL Orientation
  • Usage Rates
  • Schedule an instrument
  • Facility Guide
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    • Machine Shop
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X-Ray Photoelectron Spectroscopy

In X-ray photoelectron spectroscopy (XPS), also called electron spectroscopy for chemical analysis (ESCA), X-rays excite photoelectrons, and the emitted electron signal is plotted as a spectrum of binding energies. Differing chemical states resulting from compound formation are reflected in the photoelectron peak positions and shapes. Spectral information is collected from a depth of 2-20 atomic layers, depending on the material studied. MRL has one instrument for X-Ray Photoelectron Spectroscopy. The strength of XPS is its ability to identify different chemical states. This ability is useful in a range of physical studies, for example, oxidation/corrosion products, adsorbed species, and thin-film growth processes.

 

Equipment NameContactLocation
Kratos Supra+ XPS
  • Richard T Haasch
  • Mohammad Amdad Ali
B08 MRL

The Kratos Supra+ XPS features: Excitation Sources Dual Anode X-ray Source: Mg, Al Monochromatic Xray Source: Al Detection System Small Area Extraction Optics: Hybrid Spherical Capacitor Electron Energy Analyzer for Spectroscopy and 2-D Imaging

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Materials Research Laboratory

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Materials Research Lab

104 South Goodwin Ave. MC-230

Urbana, IL 61801

Phone: (217) 333-1370

Fax: (217) 244-2278

Email: mrl@illinois.edu

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