Keyence VK-X1000 3D Laser Scanning Confocal Microscope

The Keyence VK-X1000 employs a 404 nm laser to map and measure the surface of samples through confocal scanning or widefield focus variation. With an automated stage and six objectives this instrument can be used to measure surface profiles with 20 nm vertical resolution and diffraction limited lateral resolution over areas up to 50 mm x 50 mm. With an advanced image analysis software, the VK-X1000 allows for the determination of line and surface roughness of flat or curved surfaces, radii of curvature, step heights, volume and surface area of pores and protrusions, among many other surface morphology measurements. The VK-X1000 is also capable of measuring transparent thin film thickness and surface morphology of the buried interfaces under these films.

Technique introduction: https://go.illinois.edu/3Dopticalprofilometry

Instrument operations pre-training video: https://go.illinois.edu/Keyencetrainingvideo

Data processing/analysis training video: https://go.illinois.edu/Keyenceanalysisvideo