Reactor Vacuum Furnace (RVF)

Features:

• Maximum temperature: 1000 ^oC (with quartz tube) and 1200 ^oC (with alumina tube)
• Vacuum down to below 100m Torr, higher with gas flow
• With 1-inch outer diameter quartz tube the maximum temperature is 1000 ^oC
• With 1-inch outer diameter ceramic tube the maximum temperature is 1200 ^oC
• 2 Mass Flow Controllers:
• 0-1SLM Argon
• 0-1SLM Hydrogen or Methane or Ethylene or Oxygen
• Data acquisition system
• Downstream Pressure Regulation,  0.1 to 500 Torr
• Pyrometer
• Four Thermocouples which can be moved to custom locations
• Five capacitance manometers:
• Upstream absolute 1000 Torr
• Downstream absolute 1000 Torr
• Differential 1000 Torr
• Differential 100 Torr
• Differential 10 Torr
• Combination Piezo and Pirani gauge for full pressure range measurement