Wet Processing
Wet processing work in the MRL Cleanroom is supported by several fume hoods and flow benches for processes involving acids, solvent developer, and metal etchants.
Wet Processing Equipment
Equipment Name | Contact | Location | |
---|---|---|---|
Equipment Name | Contact | Location | |
Solvent Fume Hood or Developer Fume Hood |
|
384 MRL |
The solvent or developer fume hoods include DI water, nitrogen gun and ultrasonic bath. |
Metal Etchant Fume Hood |
|
387 MRL |
MRL provides the following metal etchants for cleanroom users: - Copper Etchant CE-100 - Chromium Etchant 9057 - Iron Oxide Mask Etchant ME-9028 - Gold Etchant Type TFA |
Acid Fume Hood |
|
359 MRL |
MRL provides the following acids for cleanroom users. This fume hood includes DI water, nitrogen gun and hot plate. |