Wet processing work in the MRL Cleanroom is supported by several fume hoods and flow benches for processes involving acids, solvent developer, and metal etchants.

Wet Processing Equipment

Equipment Name Contact Location
Equipment Name Contact Location
Solvent Fume Hood or Developer Fume Hood xlwang84 384 MRL

The solvent or developer fume hoods include DI water, nitrogen gun and ultrasonic bath.

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Metal Etchant Fume Hood xlwang84 387 MRL

MRL provides the following metal etchants for cleanroom users: - Copper Etchant CE-100 - Chromium Etchant 9057 - Iron Oxide Mask Etchant ME-9028 - Gold Etchant Type TFA

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Acid Fume Hood xlwang84 359 MRL

MRL provides the following acids for cleanroom users. This fume hood includes DI water, nitrogen gun and hot plate.

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