MRL Photomask Fabrication Facility

Location: 388 Materials Research Laboratory

The MRL cleanroom extends photomask fabrication services to academic and industry users alike. These masks are suitable for direct-contact photolithography employing Mask aligners such as the EVG 6200 TB, Karl Suss MJB4, etc. The MRL has a Heidelberg MLA 150 laser writer for making photomasks. Below are examples of bright-field and dark-field photomask plates fabricated at MRL:

Dark-field photo mask

Bright-field photo mask

Should you require a mask, there are two distinct options at your disposal:

1. You can submit your design file for the MRL staff to fabricate the mask on your behalf.

2. Alternatively, you can train to utilize the Heidelberg MLA 150 laser writer tool and receive mask fabrication training to create your own masks.

Below outlines the Photomask fabrication policy at MRL:

To request photomasks, please contact photomasks@mrl.illinois.edu
Each submission corresponds to one mask. For multi-layer designs, each layer requires a separate submission.
Accepted file formats include CIF and GDS II only. For other file formats or design-related issues, please consult with us before sending the design file.
Users have the option to request design creation as well, but it’s essential to factor in extra time for this request.
The minimum feature size is 1µm.
Available plates range from 3″ to 5″ Chrome Soda-Lime glass Mask plates.
Turnaround time depends on the queue and staff and tool availability. We strive to complete the mask within about 3 business days after accepting and approving the mask design, but the turnaround time may be longer. Please allow a minimum of 2 business days for shipping once the mask is fabricated.

*2024 Mask Services Prices ()**	UIUC	External academic institutions	Industry
3" x 3" mask (Cr-coated soda lime plate)	$110	$160	$320
5"x 5" mask (Cr-coated soda lime plate)	$120	$170	$330
4" x 4" mask (Cr-coated fused silica plate)	$260	$300	$470
(*) our prices include all fees, raw material, and shipping to outside customers

Photomask Fabrication Online Payments

Lab location:

Room 388 Materials Research Laboratory

Staff Contact:

Primary contact:
Dr. Mrinal Kanti Hota
hotamk@illinois.edu
Room# MRL 380

Secondary contact:
Dr. Mauro Sardela
sardela@illinois.edu
Room# MRL SC 2014