Usage Rates
Research Facilities
- Public Sector rate table
(includes researchers from the University of Illinois, UI EnterpriseWorks startup incubator, and other Academic and Government Institutions) - Private Sector rate table
If you have any questions, please contact Director of Central Research Facilities Mauro Sardela at (217) 244-0547 or MRL Associate Director for Administration Kristopher Williams at (217) 244-2943.
Photomask Services
- Mask pricing
(includes UIUC, Public Sector, and Private Sector)
If you have questions, please contact Facilities staff at photomasks@mrl.illinois.edu.