Usage Rates

Research Facilities

• Public Sector rate table
  (includes researchers from the University of Illinois, UI EnterpriseWorks startup incubator, and other Academic and Government Institutions)
• Private Sector rate table

If you have any questions, please contact Director of Central Research Facilities Mauro Sardela at (217) 244-0547 or Associate Director for Administration Kristopher Williams at (217) 244-2943.

Photomask Services

• Mask pricing
  (includes UIUC, Public Sector, and Private Sector)

If you have questions, please contact Facilities staff at photomasks@mrl.illinois.edu.