Usage Rates

Research Facilities

Rates valid January 1, 2018

If you have any questions, please contact Director of Central Research Facilities Mauro Sardela at (217) 244-0547 or Director of Operations Kristopher Williams at (217) 244-2943.

Photomask Services

Rates valid January 1, 2018

  • Mask pricing
    (includes UIUC, Public Sector, and Private Sector)

If you have questions, please contact Facilities staff at