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Usage Rates

Research Facilities

If you have any questions, please contact Director of Central Research Facilities Mauro Sardela at (217) 244-0547 or Associate Director for Administration Kristopher Williams at (217) 244-2943.

Photomask Services

  • Mask pricing
    (includes UIUC, Public Sector, and Private Sector)

If you have questions, please contact Facilities staff at