J.A. Woollam VASE

Equipment Location: 
148 MRL

For spectroscopic ellipsometry.


  • Measure optical constants and thickness of multilayers or bulk materials, as well as reflectance and transmission as a function of angle of incidence, polarization, and wavelength.
  • Wavelength range: 240 nm to 1700 nm;
  • Angle of incidence: 12° to 90°; Temperature: 10 K to 700 K (small aside box – resources)


Ellipsometry Tutorial

Ellipsometry Spreadsheet