J.A. Woollam VASE
For spectroscopic ellipsometry.
- Measure optical constants and thickness of multilayers or bulk materials, as well as reflectance and transmission as a function of angle of incidence, polarization, and wavelength.
- Wavelength range: 240 nm to 1700 nm;
- Angle of incidence: 12° to 90°; Temperature: 10 K to 700 K
- New camera to inspect the exact area of the sample being probed (as small as 100 µm diameter spot size with focusing probes)