J.A. Woollam VASE








For spectroscopic ellipsometry.


  • Measure optical constants and thickness of multilayers or bulk materials, as well as reflectance and transmission as a function of angle of incidence, polarization, and wavelength.
  • Wavelength range: 240 nm to 1700 nm;
  • Angle of incidence: 12° to 90°; Temperature: 10 K to 700 K 
  • New camera to inspect the exact area of the sample being probed (as small as 100 µm diameter spot size with focusing probes)


Ellipsometry Tutorial

Ellipsometry Spreadsheet


Research Scientist