J.A. Woollam VASE








For spectroscopic ellipsometry.


  • Measure optical constants and thickness of multilayers or bulk materials, as well as reflectance and transmission as a function of angle of incidence, polarization, and wavelength.
  • Wavelength range: 240 nm to 1700 nm;
  • Angle of incidence: 12° to 90°; Temperature: 10 K to 700 K 
  • New camera to inspect the exact area of the sample being probed (as small as 100 µm diameter spot size with focusing probes)


Ellipsometry Tutorial

Ellipsometry Spreadsheet


MRL Facilities Postdoctoral Associate