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Electron Microscopy

The electron microscopy suite at MRL boasts a wide range of techniques, from Scanning Electron Microscopy (SEM) and dual-beam Focused Ion Beam (FIB), to Transmission Electron Microscopy (TEM) and Scanning Transmission Electron Microscopy (STEM). A variety of sample preparation tools for electron microscopy is also available.

Techniques

Transmission and Scanning Transmission Electron Microscopy (TEM/STEM)

Determine the microstructure of materials such as grain size, defect density and type, and dislocation distribution; study the local microstructure including heterointerface and individual nanostructures; examine crystalline and amorphous structures; determine the composition of materials from micrometer level down to atomic level.

Focused Ion Beam (FIB) FIB/SEM DualBeam Systems

The DualBeam systems integrate a high-resolution scanning Focused Ion Beam microscope (FIB) and a Field Emission Scanning Electron Microscope (FE-SEM) in one instrument.  It provides significant new capabilities for microscopic imaging, nano-fabrication and site-selective sample preparation.

Scanning Electron Microscopy (SEM)

SEM is generally used to study topography, morphology and local chemical and phase composition on the scale of nanometers to millimeters.

EM Support Instruments

Variety of tools for microscopy sample preparation.



Equipment in this Core

Equipment Name Contact Location Techniques
Equipment Name Contact Location Techniques
ThermoFisher Glacios Cryo-TEM flatt1 zyw 0026 Supercon
  • Transmission and Scanning Transmission Electron Microscopy (TEM/STEM)

The ThermoFisher Glacios is a high-end, 200kV X-FEG cryogenic transmission electron microscope (CryoTEM) optimized for Single Particle Analysis (SPA), electron tomography, and micro-electron diffraction (microED). The Glacios is equipped with industry-leading Autoloader grid manipulation technology controlled by the ThermoFisher EPU software, allowing users to assess sample quality in a contamination-free environment. The microscope is also equipped with a Volta Phase Plate and Falcon4 Direct Electron Detector, making the Glacios both a stand-alone system for high-resolution SPA data acquisition, and a tool for pre-optimization of sample quality before transfer to a Krios CryoTEM system.

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UV/Ozone Cleaner jcspear 0015 Supercon
  • EM Support Instruments

It is a very simple cleaning technique used in air at ambient temperatures.  The tool can accommodate a full size silicon wafer which can be placed close to the UV source to remove unwanted organic contamination.  It is operated in a fume hood due to ozone production and with the door closed due to the UV light.  There is one power switch which can be turned on as long as the user needs for sample cleaning but must be manually turned off when finished.

 

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Fischione 2550 Cryo Transfer Tomography Holder wswiech cqchen 0011 Supercon
  • EM Support Instruments

A single-tilt holder for cryo transfer and tomography of thin-film frozen-hydrated/vitrified specimens. For transmission electron microscopes (TEMs) with a wider gap pole piece (an approx. 5 mm gap for tomographic studies)

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Leica Cryo Ultramicrotome UC6/FC6 raremy flatt1,lamiller 0011 Supercon
  • EM Support Instruments

Room-temperature and cryo-sectioning of biological and industrial specimens

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Gatan Precision Etching Coating System (PECS) cqchen zyw B59 MRL
  • EM Support Instruments

The Model 685.O precision etching coating system (PECS™) II is a table top broad beam argon milling tool for polishing as well as coating samples.

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FEI Themis Z Advanced Probe Aberration Corrected Analytical TEM/STEM cqchen hhzhou B66 MRL
  • Transmission and Scanning Transmission Electron Microscopy (TEM/STEM)

The FEI Themis Z is and advanced analytical scanning/transmission electron microscope (STEM/TEM) from Thermo Fisher Scientific Company that operates between the electron energy of 60 to 300 keV with a Schottky electron emitter, an electron energy monochromator, and a 5th order probe spherical aberration corrector.

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TechCut 4 Precision Low Speed Saw cqchen B56 MRL
  • EM Support Instruments

The TechCut 4 is a precision low speed saw excellent for cutting smaller, delicate samples.

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Polaron Carbon String Coater cqchen B59 MRL
  • EM Support Instruments

The Polaron Carbon String Coater use carbon rod and carbon string as the evaporation source respectively.

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FEI Vitrobot Mark III wswiech flatt1 B59 MRL
  • EM Support Instruments

The FEI Vitrobot (Vitrification Robot) Mark III (Type FP 5350/61) is a fully PC-controlled cryo-plunger for vitrification (= rapid cooling) of aqueous samples used later in cryo-electron microscopy (typically in JEOL JEM-2100 TEM).

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Hysitron PI 95 In-Situ TEM Picoindenter cqchen 0011 Supercon
  • EM Support Instruments

The Hysitron (now Bruker) PI 95 In-Situ TEM Picoindenter is for quantitative, direct-observation, nanomechanical testing inside TEM.

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Other Polishers cqchen B56 MRL, 0015 Supercon
  • EM Support Instruments

Buehler MetaServ 250 (2 identical pieces), Room MRL B56

Buehler ECOMET 3/III Polishers, Room SC 0015

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Gatan 656 Disc Grinder System cqchen B56 MRL
  • EM Support Instruments
Gatan 656 Dimple Grinder cqchen B56 MRL
  • EM Support Instruments

It is fast and reliable mechanical method of pre-thinning TEM sample to near electron transparency to greatly reduce ion milling times and uneven thinning. Advantages includes: Large transparent areas; stronger specimen with a thick supporting rim to protect and strengthen the specimen after dimpling; accurate depth and thickness control.

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Well 3241 Precision Diamond Wire Saw cqchen B56 MRL
  • EM Support Instruments

The Well Precision Diamond Wire Saw is used for precise cutting of small samples. It uses a stainless steel wire with diamonds embedded into the surface of the wire as the “cutting tool”. The wire is wound onto a drum which mounts onto a precision reciprocating motor. The wire diameters range from 0.06mm (0.002 in.) to 0.70mm (.028 in.).

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Allied TechCut 4™ Precision Low Speed Saw cqchen B56 MRL
  • EM Support Instruments

The TechCut 4™ is a precision low speed saw excellent for cutting smaller, delicate samples. The pivoting cutting arm has adjustable weights to apply or counterbalance downward force to the sample during sectioning. Cutting fluid is drawn from the reservoir by the blade to cool the sample. With a 3" to 6" blade range, samples up to 2" thick can be sectioned.

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MRI 150 low speed diamond blade saw cqchen B56 MRL
  • EM Support Instruments

The MRI-150 low-speed diamond saw equips with a digital micrometer and digital speed display controller. It is a tool for cutting/dicing/slicing materials (metals, ceramic, etc) up to an inch thickness. Cutting fluid is drawn from the reservoir by the blade to cool the sample.

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Syntron vibratory polishers (two identical pieces) cqchen 0015 Supercon
  • EM Support Instruments

Vibratory polishing is an effective final polishing technique that is widely used with metals that are difficult to polish. The vibrations in both vertical and horizontal directions produced by electromagnetic forces induce the sample to move about its axis and around the cloth periphery. The vibration amplitude is adjusted to a level just adequate to produce smooth movement around the bowl. The gentle polishing greatly reduced the surface residual stress and strain.

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Allied MultiPrep System cqchen B56 MRL
  • EM Support Instruments

The MultiPrep™ System enables precise semiautomatic sample preparation of a wide range of materials for microscopic (optical, SEM, TEM, AFM, etc.) evaluation. It can be used for parallel polishing or angled polishing.

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Au-Pd Sputter Coater - Emscope SC 500 cqchen jcspear 0021 Supercon
  • EM Support Instruments

The Au-Pd sputter coater is used for producing an even coating on the surface of the specimen. The coating will help inhibit charging, reduce thermal damage, and improve secondary electron emission which are beneficial for Scanning Electron Microscopy.

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Au-Pd Sputter Coater - Emitech K575 cqchen jcspear 0018 Supercon
  • EM Support Instruments

The Au-Pd sputter coater is used for producing an even coating on the surface of the specimen. The coating will help inhibit charging, reduce thermal damage, and improve secondary electron emission which are beneficial for Scanning Electron Microscopy.

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Cressington Carbon Coater 108carbon/A cqchen B59 MRL
  • EM Support Instruments

The Cressington 108 carbon coaters use carbon rod as the evaporation source. It is generally used for coating SEM or TEM samples where metal coatings need to be avoided. It offers the choice of either manual or automatic evaporation. In manual mode the evaporation source can be operated in "pulse" or "continuous" modes.

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Fischione 1020 plasma cleaner cqchen B70 MRL
  • EM Support Instruments

The Fischione 1020 plasma cleaner can be used for gently removed organic contamination from both TEM and SEM samples and specimen holders by using Argon-oxygen high frequency plasma. The plasma cleaner has an automated timer control and accepts TEM specimen holders and SEM holders.

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Princeton Scientific WS-25 Precision Wire Saw cqchen hhzhou B56 MRL
  • EM Support Instruments

The Princeton WS-25 Precision Wire Saw can perform cuts using a  diamond dotted wire as well as with free abrasive method by using thin tungsten wire moistened with an oil or glycerin-suspended abrasive slurry.

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Tergeo-EM Plasma Cleaner cqchen hhzhou B62 MRL
  • EM Support Instruments

The Tergeo-EM plasma cleaner can be used to remove hydrocarbon contaminations on TEM and SEM samples.

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Thermo Scios2 Dual-Beam SEM/FIB hhzhou cqchen B58 MRL
  • Focused Ion Beam (FIB) FIB/SEM DualBeam Systems

Fast and easy preparation of high-quality, site-specific, TEM and atom probe samples using the Sidewinder HT ion column and EasyLift™ system for precise milling and in-situ sample manipulation and lift-out. To achieve the high-quality results, final polishing with low-energy ions is required to minimize surface damage on the sample. The Sidewinder HT provides high-resolution imaging and milling at high voltages, but has also good low-voltage performance (to 500V), enabling the creation of high-quality TEM lamella.

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GATAN Cryo Precision Ion Polishing System (Cryo-PIPS) cqchen B59 MRL
  • EM Support Instruments

Gatan Cryo-PIPS has additional capabilities in addition to the features of the Gatan PIPS

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GATAN Precision Ion Polishing System (PIPS) cqchen jeffers B59 MRL
  • EM Support Instruments

The Gatan 691 Precision Ion Polishing System (PIPSTM) is a user-friendly precision Argon ion beam polisher designed to produce high quality, TEM specimens with minimal effort.

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JEOL 2010 LAB6 TEM wswiech cqchen 0017 Supercon
  • Transmission and Scanning Transmission Electron Microscopy (TEM/STEM)

The 2010LaB6 is a conventional TEM. It is optimized for BF/DF imaging, diffraction and high sample tilts.

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JEOL 2100 CRYO TEM wswiech flatt1,cqchen 0011 Supercon
  • Transmission and Scanning Transmission Electron Microscopy (TEM/STEM)

The 2100 Cryo is a conventional TEM with large pole piece gap. It is optimized for BF/DF imaging, diffraction and high sample tilts. Also capable of imaging ultrathin biological tissue sections. It operates at 200kV. The 2100 Cryo is equipped with a combined video rate/slow scan camera for real time imaging and final image recording. It has a low-dose mode. A high tilt is available with +/-70 degrees using a special tip for the single tilt holder. Cryo transfer stage, double tilt heating, and liquid N2 stages are available.

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Hitachi H-9500 Dynamic Environmental TEM cqchen wswiech B66A MRL
  • Transmission and Scanning Transmission Electron Microscopy (TEM/STEM)

The H-9500 is a high resolution 100-300 kV ETEM with a LaB6 electron gun equipped for study of dynamic material reactions down to the atomic scale.

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JEOL 2200 FS (S)TEM cqchen hhzhou B70C MRL
  • Transmission and Scanning Transmission Electron Microscopy (TEM/STEM)

The aberration-corrected JEM-2200FS, a state-of-the-art analytical electron microscope, is equipped with a 200kV field emission gun (FEG), a CEOS probe Cs-corrector, and an in-column energy filter (Omega Filter) that allows elemental analysis and chemical analysis of specimens. It is also equipped with an Energy Dispersive X-ray Spectrometer (EDS) and a CCD-camera. With an available small probe size of ~0.1 nm, atomic level high-resolution high-angle annular dark-field (Z-contrast) images, and high resolution EELS spectrum imaging can be obtained. With the low background Be specimen holder, large (50mm2) detector area, and the hard X-ray aperture, high-quality EDS analysis and mapping is available.

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FEI Helios 600i Dual Beam SEM/FIB hhzhou cqchen B58 MRL
  • Focused Ion Beam (FIB) FIB/SEM DualBeam Systems

The Helios NanoLab 600i is an advanced SEM/FIB DualBeam™ workstation for ultra-high resolution imaging and focussed Ga+ ion beam milling for nano-prototyping, nano-machining, nano-analysis, and sample preparation for TEM and atom probe.

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JEOL JSM-6060LV Low-Vacuum SEM jcspear zyw, wswiech 0021 Supercon
  • Scanning Electron Microscopy (SEM)

The JSM-6060LV is a general purpose high-performance scanning electron microscope with excellent secondary electron imaging and backscattered electron Imaging resolution.

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Hitachi S-4700 High Resolution SEM zyw hhzhou 0018 Supercon
  • Scanning Electron Microscopy (SEM)

The Hitachi S-4700 SEM features: High Resolution Low Voltage Imaging; Centaurus BSE detector; iXRF EDS Elemental Analysis System with Oxford Instruments (Si(Li) detector, ATW2 window, 10 mm-square detection area, 138 eV Resolution at 5.9 keV, Element Detection (Be-U))

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Hitachi S-4800 High Resolution SEM jcspear hhzhou,flatt1,zyw 0013 Supercon
  • Scanning Electron Microscopy (SEM)

The Hitachi S-4800 SEM features: - High Resolution Low Voltage imaging - Beam deceleration (ultra-low landing voltages (100-500 V) for shallow surface topography) - Controlled signal mixing (combination of secondary electron and back scattered electron) - Pure BSE imaging at low voltages

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JEOL 7000F Analytical SEM zyw cqchen 0020 Supercon
  • Scanning Electron Microscopy (SEM)

The JSM-7000F SEM offers very high resolution, a multi-purpose specimen chamber, a motorized automated specimen stage, one-action specimen exchange, and ideal analytical geometry with large probe current at small probe diameter to meet the needs for high performance characterization of nanostructures using techniques including EDS, WDS, EBSD, and CL.

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