Research Cores
Bio Services
- Service lab for biological and soft materials
- In-house negative staining for viruses, bacteria, proteins, polymers, nanoparticles, etc.
- SEM preparation for biological materials, with custom SEM prep available
- Full embedding and microtoming services, including cryo-ultramicrotomy
- Experience with preparing biological samples using fixative
- Cryo TEM: sample preparation and analysis
MRL Carver BioMaker Laboratory
- GEMSIM 2.1 Nanoplotter NP2.1 with attachments for robotic, nano-liter controlled spotting of cells
- Cellink Bio X 3D printer for multiple-injection
- CADworks microfluidics printer with attachments
- MTI electrospinning system with 3 collector and temperature/humidity control for fiber production
- Beckman Optima LE-80K ultracentrifuge with rotors
- MFP-3D-Bio Atomic Force Microscope (AFM) this system includes the Olympus IX71 inverted optical fluorescence microscope for direct imaging of sample areas of interest.
- Zeiss Fluorescence Confocal LSM7 microscope
- Zeiss Axiovert
MRL Battery Fabrication and Characterization Lab
The Battery Lab at MRL provides primarily the fabrication, processing, and characterization of Lithium-ion batteries. It has all the facilities to fabricate pouch cells and coin cells in the laboratory scale, including their complete electrochemical characterizations at room temperature.
AMTEL (Advanced Materials Testing and Evaluation Laboratory)
The Advanced Materials Testing and Evaluation Laboratory is a state-of-the-art facility for mechanical testing of coupon specimens to determine baseline engineering properties, conduct sophisticated biaxial testing, and perform full field optical stress analysis.
The lab includes test frames with a range of tension-tension and tension-torsion loading at rates appropriate for creep testing up to high cycle fatigue analysis. Each of these machines can additionally be coupled with a broad range of temperature control capabilities.
Machine capacities vary from 500 Newtons to 400 kilonewtons for sample dimensions ranging from microns to centimeters. In conjuction with these servohydraulic and screw driven load frames, AMTEL has developed a state-of-the-art optical stress analysis lab with modern tools for Digital Image Correlation (DIC), Photoelastic Stress Analysis (PSA), Thermoelastic Stress Analysis (TSA) as well as Thermography capabilities for nondestructive testing. Metallic, polymer, semiconductor, biological, ceramic, and composite samples can be tested to study the fatigue, creep and fracture behavior of materials and components.
MRL Photomask Fabrication Facility
The Materials Research Laboratory (MRL) cleanroom offers precision photomask fabrication services to both academic and industrial users. These masks are optimized for use in contact photolithography systems, such as the EVG 6200 TB and Karl Suss MJB4, as well as other mask aligners.
We support the fabrication of both bright-field and dark-field photomasks:
- Bright-field photomask: A type of mask where the background (field) is transparent, and the features to be patterned are opaque (chrome). It is commonly used for the etching process using positive-tone photoresists.
- Dark-field photomask: A mask in which the background is opaque, and the features to be patterned are transparent. It is typically used for the lift-off process using positive-tone photoresists.
Below are examples of both types fabricated at MRL:
Bright-field photomask
Dark-field photomask
Photomask Fabrication Policy:
- To request a photomask, please contact: photomasks@mrl.illinois.edu
- One submission = one mask. For multi-layer designs, each layer must be submitted separately.
- Accepted file formats: GDSII and CIF. For other formats or design-related questions, please consult us before submission.
- Design assistance is available upon request. Additional time and fees may apply.
- Minimum feature size: 1 µm
- Available mask substrates: 3″ to 5″ Chrome on soda-lime glass or fused silica
- Turnaround time: Turnaround time depends on the queue, staff, and tool availability. We strive to complete the mask within about 3 business days following design approval and payment, but the turnaround time may be longer. Please allow a minimum of 2 business days for shipping once the mask is fabricated.
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MRL 2025 Photomask Services Pricing* |
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Plate type |
UIUC |
External Academic |
Industry |
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3" x 3" mask (Cr-coated soda lime plate) |
$110 |
$160 |
$320 |
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4" x 4" mask (Cr-coated fused silica plate) |
$260 |
$300 |
$470 |
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5"x 5" mask (Cr-coated soda lime plate) |
$120 |
$170 |
$330 |
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(*) our prices include all fees, raw material, and shipping to outside customers |
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Photomask Fabrication Online Payments
Lab location:
Room 388 Materials Research Laboratory
Staff Contact:
Primary contact:
Dr. Mrinal Kanti Hota
hotamk@illinois.edu
Room# MRL 380
Secondary contact:
Dr. Mauro Sardela
sardela@illinois.edu
Room# MRL SC 2014