ThermoFisher NOVA NanoSEM 650
Features:
- Gun: Schottky Field Emission Gun
- High Vacuum (HiVac) Mode: The typical chamber pressure value is within the order from 10-3 to 10-4 Pa.
- Low Vacuum Mode: < 200 Pa for the analysis of non-conductive specimens without coating.
- Resolution: 1.4 nanometer (nm) resolution in high-vacuum (HV) mode [1 kV]
- Voltage range: 0.50-30 KV, beam current up to 200 nA.
- Spot size range: 1-7 with 0.5 increment
- Working distance (WD): 5 mm
- 5-axes motorized x-y-z-rotate-tilt stage, of which x, y and rotation movements are piezo-controlled. Movement ranges (all motorized):
x, y: 150 mm
z: 10 mm
Tilt: +60 to -10 degrees
Minimum step size: 100 nm - Beam deceleration mode: It allows the primary beam to decelerate up to 50 V landing energy. It improves the microscope resolution at low accelerating voltages.
- Detectors:
- Infrared CCD Camera,
- ETD (Everhart Thornley Detector, normal SEM imaging),
- DBS (Directional backscatter Detector for backscatter imaging),
The Detector includes four annular segments concentric with the beam, allowing it to discriminate BSEs by angle and capture comprehensive information in one scan. Select any or all segments, in any combination, to create the image that best meets analytical requirements while improving time to data, minimizing sample damage, and gaining unique insights into the sample.
- TLD (Through Lens Detector, immersion mode for high resolution imaging)
- Smart navigation features. Nav-Cam and correlative navigation solutions enable fast, easy navigation around a sample.