Electron Microscopy

The electron microscopy suite at MRL boasts a wide range of techniques, from Scanning Electron Microscopy (SEM) and dual-beam Focused Ion Beam (FIB), to Transmission Electron Microscopy (TEM) and Scanning Transmission Electron Microscopy (STEM). A variety of sample preparation tools for electron microscopy is also available.


EM Support Instruments

Variety of tools for microscopy sample preparation.

Focused Ion Beam (FIB)

Dual-beam Focused Ion Beam (FIB) is a combination of a high-resolution field emission scanning electron microscope (FE-SEM) and a scanning metal ion beam microscope. It provides significant new capabilities for microscopic imaging, nanofabrication, and site-selective TEM sample preparation.

Scanning Electron Microscopy (SEM)

SEM is generally used to study topography, morphology and local chemical and phase composition on the scale of nanometers to millimeters.

Transmission and Scanning Transmission Electron Microscopy (TEM/STEM)

Determine the microstructure of materials such as grain size, defect density and type, and dislocation distribution; study the local microstructure including heterointerface and individual nanostructures; examine crystalline and amorphous structures; determine the composition of materials from micrometer level down to atomic level.


Equipment in this Core

Equipment Name Contact Location Technique(s)
Allied MultiPrep System cqchen@illinois.edu B56 MRL
Allied TechCut 4™ Precision Low Speed Saw cqchen@illinois.edu B56 MRL
Au-Pd Sputter Coater - Emitech K575 cqchen@illinois.edu 0018 Supercon
Au-Pd Sputter Coater - Emscope SC 500 cqchen@illinois.edu 0021 Supercon
Cressington Carbon Coater 108carbon/A cqchen@illinois.edu B59 MRL
FEI Helios 600i Dual Beam SEM/FIB hhzhou@illinois.edu B58 MRL
FEI Themis Z Advanced Probe Aberration Corrected Analytical TEM/STEM cqchen@illinois.edu B66 MRL
FEI Vitrobot Mark III wswiech@illinois.edu MRL B59
Fischione 1020 plasma cleaner cqchen@illinois.edu B70 MRL
Fischione 2550 Cryo Transfer Tomography Holder wswiech@illinois.edu 0011 Supercon
Gatan 656 Dimple Grinder cqchen@illinois.edu B56 MRL
Gatan 656 Disc Grinder System cqchen@illinois.edu B56 MRL
GATAN Cryo Precision Ion Polishing System (Cryo-PIPS) cqchen@illinois.edu B59 MRL
Gatan Precision Etching Coating System (PECS) cqchen@illinois.edu B59
GATAN Precision Ion Polishing System (PIPS) cqchen@illinois.edu B59 MRL
Hitachi H-9500 Dynamic Environmental TEM cqchen@illinois.edu B66A MRL
Hitachi S-4700 High Resolution SEM zyw@illinois.edu 0018 Supercon
Hitachi S-4800 High Resolution SEM zyw@illinois.edu 0013 Supercon
Hysitron PI 95 In-Situ TEM Picoindenter cqchen@illinois.edu 0011 Supercon
JEOL 2010 LAB6 TEM wswiech@illinois.edu 0017 Supercon
JEOL 2100 CRYO TEM wswiech@illinois.edu 0011 Supercon
JEOL 2200 FS (S)TEM cqchen@illinois.edu B70C MRL
JEOL 7000F Analytical SEM zyw@illinois.edu 0020 Supercon
JEOL JSM-6060LV Low-Vacuum SEM zyw@illinois.edu 0021 Supercon
Leica Cryo Ultramicrotome UC6/FC6 raremy@illinois.edu, flatt1@illinois.edu 0011 Supercon
MRI 150 low speed diamond blade saw cqchen@illinois.edu B56 MRL
Other Polishers cqchen@illinois.edu B56 MRL, 0015 Supercon
Polaron Carbon String Coater cqchen@illinois.edu B59 MRL
Syntron vibratory polishers (two identical pieces) cqchen@illinois.edu 0015 Supercon
TechCut 4 Precision Low Speed Saw cqchen@illinois.edu MRL B56
Thermo Scios2 Dual-Beam SEM/FIB hhzhou@illinois.edu B58 MRL
UV/Ozone Cleaner jcspear@illinois.edu 0015 Supercon
Well 3241 Precision Diamond Wire Saw cqchen@illinois.edu B56 MRL