Surface Treatment and Modification

The Materials Research Laboratory (MRL) offers ultraviolet (UV) and plasma-based surface treatment technologies to support materials research, thin-film processing, microfabrication, and advanced electronic device development. These techniques enable researchers to remove organic surface contaminants, modify surface properties, improve wettability and adhesion, and perform controlled UV exposure and curing of compatible materials.

MRL provides three complementary techniques: UV/Ozone Cleaning, UV Flood Exposure, and Oxygen Plasma Treatment. Each employs a distinct physical or chemical mechanism and is suited to specific materials, processing requirements, and research applications.

	UV/Ozone Cleaning Cleaning and activation		UV Flood Exposure Exposure and curing activation		Oxygen Plasma Treatment Plasma cleaning and activation

 

Available Surface Treatment Techniques

1. UV/Ozone Cleaning (Organic Contamination Removal and Surface Activation)

UV/ozone cleaning uses ultraviolet radiation to generate reactive oxygen species that remove organic surface contaminants and modify surface chemistry.

Typical applications: Substrate cleaning, surface activation, improved wettability, and surface preparation before thin-film deposition, solution-processed coating, and wire bonding.  

View UV/Ozone Cleaner →

 

2. UV Flood Exposure (Controlled UV Exposure and Curing)

The Uvitron SkyRay 800 UV LED Flood Exposure System provides controlled ultraviolet irradiation at 365 nm, with adjustable UV intensity and programmable exposure times.

Typical applications: UV curing of compatible polymers, adhesives, and coatings; direct flood exposure of photosensitive materials; and UV-induced photochemical processing of thin films.

View UV Flood Exposure System →

 

3. Oxygen Plasma Treatment (Plasma-Assisted Surface Cleaning and Activation)

Oxygen plasma treatment uses reactive oxygen species generated in a plasma environment to remove organic contaminants and modify surface properties.

Typical applications: Surface cleaning, activation of compatible polymers and substrates, improved wettability and adhesion, and surface preparation before solution process coating and wire bonding.

View Oxygen Plasma Treatment →

 Selecting the Appropriate Technique

Each surface treatment technique operates through a distinct mechanism and is suited to specific research applications. Users should select the appropriate technique based on their processing objectives, material compatibility, and desired surface properties.

For guidance on equipment selection, new materials, process development, or training, please contact MRL staff at microfabstaff@mrl.illinois.edu.

 

Comparison of Surface Treatment Techniques

 

Legend:

• ✓ Common application
• △ Material- and process-dependent
• — Not a typical application

Note: This table provides general guidance for selecting an appropriate surface treatment technique. Actual results depend on material compatibility, treatment conditions, and specific processing requirements. UV Flood Exposure is primarily for controlled UV irradiation and curing, while UV/Ozone Cleaning and Oxygen Plasma Treatment are primarily for surface cleaning and activation.

 

Equipment Name	Contact	Location
Equipment Name	Contact	Location
UV LED Flood Exposure System	Mrinal Hota hotamk Xiaoli Wang xlwang84	342 MRL	The Uvitron SkyRay 800 UV LED Flood Exposure System provides high-intensity ultraviolet (UV) irradiation at 365 nm for controlled exposure and curing of UV-sensitive materials. The system is integrated with a Rayven UV-shielded curing chamber featuring a safety door interlock for enclosed operation. See More Details