Surface Analysis

MRL’s surface analysis suite provides a variety of instrumentation for surface chemical analysis, ranging from accelerator-based techniques to various spectroscopy, spectrometry, and profilometry tools.

Techniques

Accelerator-based Techniques

Ion particles accelerated to high energy within a few MeV can be used for ion implantation of materials and also for non-destructive analytical techniques involving scattering processes such as Rutherford Backscattering Spectrometry (RBS). Two linear particle accelerators are available in the MRL Central Research Facilities: a Pelletron system, dedicated to RBS analysis using He ions, and a van de Graaff accelerator for ion implantation of He, He, Ne, Ar, Kr and Xe.

Auger Electron Spectroscopy

Auger electron spectroscopy (AES) is a surface sensitive analytical technique used mainly to determine elemental compositions of materials and, in certain cases to identify the chemical states of surface atoms. With AES, a primary electron beam is used to excite secondary and Auger electrons.

Secondary Ion Mass Spectrometry

In secondary ion mass spectrometry (SIMS), a focused ion beam is directed to a solid surface, removing material in the form of neutral and ionized atoms and molecules.

Surface Profilometry

Surface profilometry is a contact measurement technique in which a diamond-tipped stylus is used to measure surface topography as it moves across the surface of a specimen.

X-Ray Photoelectron Spectroscopy

In X-ray photoelectron spectroscopy (XPS), also called electron spectroscopy for chemical analysis (ESCA), X-rays excite photoelectrons, and the emitted electron signal is plotted as a spectrum of binding energies.

 

Equipment in this Core

Equipment Name Contact Location Technique(s)
Cameca ims 5f tspila@illinois.edu B01 MRL
HVE Van de Graaff Accelerator jeffers@illinois.edu B70 MRL
Kratos Axis ULTRA r-haasch@illinois.edu B81 MRL
NEC Pelletron Accelerator tspila@illinois.edu 130 MRL
Physical Electronics 5400 r-haasch@illinois.edu B08 MRL
Physical Electronics 660 r-haasch@illinois.edu B06 MRL
Physical Electronics Trift III tspila@illinois.edu B04 MRL
Sloan Dektak3ST sburdin@illinois.edu B80 MRL

Resources:

RBS Theory