Several furnaces covering a variety of temperature ranges under vacuum or various ambient conditions are available to carry out diffusion processes, dopant activation, ion-implantation damage repair, fabrication of graphene or carbon nanotubes, etc.

Furnace Equipment

Equipment Name Contact Location
Equipment Name Contact Location
Graphene Furnace – Max Temp. 1050°C lonw gmacdoug 322 MRL

The Graphene Furnace is solely dedicated to the growth of high-quality graphene and carbon nanotube materials.

 

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Hydrogen Vacuum Furnace – Max Temp. 1000°C lonw gmacdoug 322 MRL

The Hydrogen Vacuum Furnace is dedicated to annealing of materials under hydrogen and vacuum environment.

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Rapid Thermal Annealing furnace (Custom) – max temperature 1000°C lonw gmacdoug 328 MRL

Rapid Thermal Annealing furnace (Custom) – max temperature 1000°C

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High Temperature CM furnace – max temperature 1600°C lonw gmacdoug 328 MRL

High Temperature CM furnace – max temperature 1600°C

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Reactor Vacuum Furnace (RVF) lonw gmacdoug 322 MRL

Reactor Vacuum Furnace - 1” tube furnace for recording pressure, temperature, vacuum, and reaction products at up to 1200°C

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6" Tube oxidation furnace lonw gmacdoug 328 MRL

6" Tube oxidation furnace – max temperature 1100°C

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Yield Engineering HMDS Vapor Prime Oven-Cleanroom jeffg 388 MRL
Lindberg 3 Zone Furnace-2 inch lonw gmacdoug 328 MRL

Lindberg Three Zone 2 Inch - Tube oxidation/annealing furnace – max temperature 1100°C

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