Furnace Equipment
Several furnaces covering a variety of temperature ranges under vacuum or various ambient conditions are available to carry out diffusion processes, dopant activation, ion-implantation damage repair, fabrication of graphene or carbon nanotubes, etc.
Furnace Equipment
| Equipment Name | Contact | Location | |
|---|---|---|---|
| Equipment Name | Contact | Location | |
| Graphene Furnace – Max Temp. 1050°C |
|
322 MRL | The Graphene Furnace is solely dedicated to the growth of high-quality graphene and carbon nanotube materials. See More Details |
| Hydrogen Vacuum Furnace – Max Temp. 1000°C |
|
322 MRL | The Hydrogen Vacuum Furnace is dedicated to annealing of materials under hydrogen and vacuum environment. See More Details |
| Rapid Thermal Annealing furnace (Custom) – max temperature 1000°C |
|
328 MRL | Rapid Thermal Annealing furnace (Custom) – max temperature 1000°C See More Details |
| High Temperature CM furnace – max temperature 1600°C |
|
328 MRL | High Temperature CM furnace – max temperature 1600°C See More Details |
| Reactor Vacuum Furnace (RVF) |
|
322 MRL | Reactor Vacuum Furnace - 1” tube furnace for recording pressure, temperature, vacuum, and reaction products at up to 1200°C See More Details |
| 6" Tube oxidation furnace |
|
328 MRL | 6" Tube oxidation furnace – max temperature 1100°C See More Details |
| Yield Engineering Vacuum Curing Ovens |
|
328 MRL | |
| Yield Engineering HMDS Vapor Prime Oven-Cleanroom |
|
388 MRL | |
| Lindberg 3 Zone Furnace-2 inch |
|
328 MRL | Lindberg Three Zone 2 Inch - Tube oxidation/annealing furnace – max temperature 1100°C See More Details |