Scanning Electron Microscopy (SEM)

SEM is generally used to study topography, morphology and local chemical and phase composition on the scale of nanometers to millimeters. SEM is also used to study crystallographic relationships including texture, boundary character, strain and deformation mechanisms through electron diffraction. SEM can also be used for spectroscopic study of electron beam induced light emission (cathodoluminescence) of materials at room and liquid helium temperature. SEMs at MRL include two high resolution cold field emission SEM, an analytical Schottky source SEM equipped with EDS, WDS, EBSD, CL, and a helium cold stage, and a low vacuum general purpose SEM.

SEM Equipment