UV LED Flood Exposure System
Uvitron SkyRay 800 (UV3805)
The Uvitron SkyRay 800 UV LED Flood Exposure System provides high-intensity ultraviolet (UV) irradiation at 365 nm for controlled exposure and curing of UV-sensitive materials. The system is integrated with a Rayven UV-shielded curing chamber featuring a safety door interlock for enclosed operation.
With adjustable UV intensity and programmable exposure times, the system supports a variety of applications in materials research, thin-film processing, and microfabrication.
Key Specifications
|
Parameter |
Specification |
|
Manufacturer |
Uvitron International |
|
Model |
SkyRay 800 (UV3805) |
|
UV wavelength |
365 nm |
|
Maximum exposure area |
5 × 5 inches |
|
UV intensity setting |
10–100% |
|
Exposure time |
1–9999 seconds |
|
Exposure chamber |
Rayven UV-shielded curing chamber |
|
Approved sample position |
Bottom shelf only |
|
Safety features |
Door safety interlock and UV exposure indicators |
Applications
- UV curing: Curing of compatible UV-sensitive polymers, adhesives, resins, and coatings.
- Photoresist exposure: Direct flood exposure of compatible photoresists and photosensitive materials without photomask alignment.
- Photochemical processing: UV-induced reactions and modifications in compatible thin films and coatings.
- Materials research: Controlled UV irradiation to investigate UV-dependent material properties and processing behavior.
Operating Considerations
The SkyRay 800 operates at a fixed wavelength of 365 nm. Users must verify material compatibility and select appropriate exposure conditions for their applications.
UV irradiance depends on the selected intensity setting and sample position. The nominal exposure area should not be assumed to provide uniform irradiation. Users requiring controlled UV doses or reproducible processing should consult the irradiance calibration maps in the equipment SOP.
Only the bottom shelf is currently approved for sample processing. New materials or processes require prior approval from MRL staff.
Important: The SkyRay 800 is designed for UV exposure and curing. It is not intended for UV/ozone cleaning or photomask-aligned lithography.
Training and Equipment Access
Only trained and authorized users may operate the system independently. Users must complete the required MRL training and follow the established equipment reservation, safety, and usage-logging procedures.
For training requests, process inquiries, or technical assistance, contact microfabstaff@mrl.illinois.edu.
Note on UV LED Flood Exposure System Access at MRL
The UV LED Flood Exposure System is available inside the MRL cleanroom (MRL 387). Therefore, anyone who wishes to access this tool must first have cleanroom access.
Before applying for UV Ozone system training, users must obtain cleanroom access.
Please ensure that your cleanroom access is in place before submitting a training request for this tool.