Equipment coming soon to MRL

100-kV e-beam lithography system: Raith EBPG5150

The Raith EBPG5150 Electron Beam Lithography System is an ultra- high performance e-beam writer for nanometer-scaled device fabrication. Some of the instrument features are:

Thermal Field Emission Gun
50 and 100 kV beam energy calibration
Automatic dynamic off-axis focus, stigmation and distortion correction softwarelip>
50 MHz pattern generator, low noise 20-bit main field deflection
Field size operation, variable, up to 524 μm by 524 μm at all voltages
Overlay accuracy smaller than 5 nm.
Minimum feature size < 8 nm.
155 mm by 155 mm stage travel
Lambda/1024 (0.6 nm) laser interferometer resolution
2-holder Airlock with “straight through” loading design
5” Mask Holder
2x2 inch tables configured for piece-parts up to 2 mm thickness.
Piece-Parts Adaptor Plate for 5 inch Mask Holder = allows for several and/or odd shaped samples to be mounted.
Binocular microscope with X/Y stage and Z measurement to pre-align wafers and piece-parts on their holder prior to system loading
System control software suite “BEAMS” on fully integrated control PC running Linux OS with Ethernet Interface.
System software for GDSII design file –to- GPF layout (EBPG format) conversion and fracturing

Our system will also include an automatic aperture changer upgrade, with motorized and software automated control of system final apertures. It can save and recall multiple column alignments and lens settings. This is particularly useful for setup and execution of unattended exposure tasks. In addition, the MRL purchased the GenISys BEAMER full advanced data preparation software with Monte Carlo simulation and proximity correction packages.

Expected installation: Spring 2021, in the MRL Nano/Microfab cleanroom.