Ion particles accelerated to high energy within a few MeV can be used for ion implantation of materials and also for non-destructive analytical techniques involving scattering processes such as Rutherford Backscattering Spectrometry (RBS). Two linear particle accelerators are available in the MRL Central Research Facilities: a Pelletron system, dedicated to RBS analysis using He ions, and a van de Graaff accelerator for ion implantation of He, He, Ne, Ar, Kr and Xe.

Resources:

RBS Theory