Equipment List

Equipment Name Contact Location Technique(s)
MJB3 Mask Aligner + Stamper Tool jeffg@illinois.edu 313 MRL
MJB4 Mask Aligner jeffg@illinois.edu 313 MRL
MRI 150 low speed diamond blade saw cqchen@illinois.edu B56 MRL
Nano Engineering Workstation (eLine RAITH) taoshang@illinois.edu 313 MRL
Nano-Master Reactive Ion Etch (RIE) Plasma System xlwang84@illinois.edu 342 MRL
Nanophoton Raman 11 soares@illinois.edu 0022 Supercon
Nanoscribe Photonic Professional GT 3D Printer jeffg@illinois.edu 313 MRL
Neaspec NanoFTIR/NIM AFM, SSNOM soares@illinois.edu 0022 Supercon
NEC Pelletron Accelerator tspila@illinois.edu 130 MRL
Newport Solar Simulator soares@illinois.edu 0024 Supercon
Nordson March Reactive Ion Etch (RIE) Plasma System 1 & 2 xlwang84@illinois.edu 342 MRL
OL 750 Spectroradiometer soares@illinois.edu 248 MRL
Optical Microscopes with CCD cameras frao@illinois.edu 326 MRL
Oriel Solar Simulator soares@illinois.edu 248 MRL
Other Polishers cqchen@illinois.edu B56 MRL, 0015 Supercon
PANalytical Phillips X’pert MRD system #1 sardela@illinois.edu 148 MRL
PANalytical Phillips X’pert MRD system #2 sardela@illinois.edu 148 MRL
Photoluminescence soares@illinois.edu 0024 Supercon
Physical Electronics 5400 r-haasch@illinois.edu B08 MRL
Physical Electronics 660 r-haasch@illinois.edu B06 MRL
Physical Electronics Trift III tspila@illinois.edu B04 MRL
Piuma Nanoindenter jcspear@illinois.edu 248 MRL
Plasma-Therm 790 MF Reactive Ion Etch (RIE) Plasma System xlwang84@illinois.edu 342 MRL
Plasma-Therm Plasma Enhanced Chemical Vapor Deposition System (PECVD) xlwang84@illinois.edu 342 MRL
Polaron Carbon String Coater cqchen@illinois.edu B59 MRL
Q50 Thermogravimetric Analysis (TGA) raremy@illinois.edu 133 MRL
Q800 Dynamic Mechanical Analysis (DMA) raremy@illinois.edu 133 MRL
Raith eLine electron Beam Lithography System taoshang@illinois.edu 364 MRL
Ramé-Hart Model 250 Contact Angle Goniometer soares@illinois.edu 248 MRL
Rapid Thermal Annealing furnace (Custom) – max temperature 1000°C frao@illinois.edu 328 MRL