AJA Orion 3 Sputter Coater 2

Equipment Location: 
326 MRL

AJA sputter coater 2 is an AJA ORION 3 sputter system with three ST20 ORION magnetron sputter guns capable of sputtering conductive and dielectric materials using DC and RF Argon plasma. Co-sputtering (up to three guns, two DC and one RF power supply) is available. The system accommodates 2โ€ targets (1/4โ€ thick) including various materials such as Cr, Ti, Cu, Mo, Al, Ag, Pt, Pd, Mg, Ni, Fe, Co, Si, Ge, W, ITO, SiO2, Si3N4 and MgO. Sample holder size is 4โ€ in diameter. Reactive sputtering with O2 is available.

 

AJA Sputter Coater 2
AJA Sputter Coater 2