Hitachi S-4800 High Resolution SEM

Equipment Location: 
0013 Supercon

The Hitachi S-4800 SEM features:

  • High Resolution Low Voltage imaging
    •   1.0 nm resolution at 15 kV, WD=4mm
    •   1.4 nm resolution at 1 kV, WD=1.5nm, Deceleration mode
    •   2.0 nm resolution at 1 kV, WD=1.5mm, Normal mode
  • Beam deceleration (ultra-low landing voltages (100-500 V) for shallow surface topography)
  • Controlled signal mixing (combination of secondary electron and back scattered electron)
  • Pure BSE imaging at low voltages