AJA ATC2000 Sputter Coater 1

Equipment Location: 
336 MRL

AJA sputter coater 1 is an AJA ATC 2000 sputter system with four A320 XP UHV magnetron sputter guns capable of sputtering conductive and dielectric materials using DC and RF Argon plasma. Co-sputtering (up to three guns, two DC and one RF power supply) is available. The system accommodates 2โ€ targets (1/4โ€ thick) including various materials such as Cr, Ti, Cu, Mo, Al, Ag, Mg, Ni, Fe, Co, Si, Ge, W, ITO, SiO2, Si3N4 and MgO. Sample holder size is 4โ€ in diameter. Substrate heating is available at up to 400 C. Reactive sputtering with O2 and N2 is also available.

 

AJA Sputter Coater 1
AJA Sputter Coater 1