Kratos Supra+ XPS

Kratos Axis Supra⁺ Photoelectron spectrometer

X-ray photoelectron spectrometer : AXIS Supra+ - YouTube

Key Features:

• Hemispherical and spherical mirror energy analyzers.
• High-sensitivity Delay Line Detector (DLD).
• Automated dual anode Al Ka/Ag La (1486.7/2984.2 eV) monochromatic X-ray source.
• Maximum sample size: maximum lateral dimension  34 mm x 75 mm, maximum thickness 7mm .
• Large area mode (700 x 300 um²) and small spot mode (110 um, 55 um, 27 um, and 15 um diameters) spectroscopy.
• Imaging XPS (800 x 800 um², 400 x 400 um² and 200 x 200 um² fields-of-view) with spatial resolution down to 1 um.
• XPS image-stitching mode (up t0 10 x 10 mm²)
• Load-lock camera and high magnification analysis chamber microscope.
• Angle resolved XPS analysis.
• Ar⁺/Ar_n⁺ gas cluster ion source (GCIB) as follows: 
  Ar⁺at 50 kV, and options of Ar₅₀₀⁺ , Ar₁₀₀₀⁺ , Ar₂₀₀₀⁺ or Ar₃₀₀₀⁺ at 5, 10, 15 or 20 KV.
• Analysis chamber heating and cooling (-100°C to +800°C).
• 3-gas dosing system.
• Inert gas or vacuum sample transfer vessel.