Equipment List

Equipment Name Contactsort ascending Location Technique(s)
JEOL JSM-6060LV Low-Vacuum SEM zyw@illinois.edu 0021 Supercon
Hitachi S-4700 High Resolution SEM zyw@illinois.edu 0018 Supercon
Hitachi S-4800 High Resolution SEM zyw@illinois.edu 0013 Supercon
Solvent Fume Hood or Developer Fume Hood xlwang84@illinois.edu 384 MRL
Metal Etchant Fume Hood xlwang84@illinois.edu 387 MRL
Acid Fume Hood xlwang84@illinois.edu 359 MRL
Nordson March Reactive Ion Etch (RIE) Plasma System 1 & 2 xlwang84@illinois.edu 342 MRL
Nano-Master Reactive Ion Etch (RIE) Plasma System xlwang84@illinois.edu 342 MRL
Plasma-Therm 790 MF Reactive Ion Etch (RIE) Plasma System xlwang84@illinois.edu 342 MRL
Plasma-Therm Plasma Enhanced Chemical Vapor Deposition System (PECVD) xlwang84@illinois.edu 342 MRL
Kurt J. Lesker Nano36 Thermal Evaporator System xlwang84@illinois.edu 326 MRL
Harrick Plasma Oxygen Cleaner xlwang84@illinois.edu 326 MRL
FEI Vitrobot Mark III wswiech@illinois.edu MRL B59
JEOL 2010 LAB6 TEM wswiech@illinois.edu 0017 Supercon
JEOL 2100 CRYO TEM wswiech@illinois.edu 0011 Supercon
Fischione 2550 Cryo Transfer Tomography Holder wswiech@illinois.edu 0011 Supercon
Cameca LEAP 5000XS Atom Probe Tomography tspila@illinois.edu B01 MRL
NEC Pelletron Accelerator tspila@illinois.edu 130 MRL
Physical Electronics Trift III tspila@illinois.edu B04 MRL
AJA Orion 3 Sputter Coater 2 taoshang@illinois.edu 326 MRL
AJA ATC2000 Sputter Coater 1 taoshang@illinois.edu 336 MRL
AJA E-beam evaporator 1 taoshang@illinois.edu 348 MRL
Nano Engineering Workstation (eLine RAITH) taoshang@illinois.edu 313 MRL
Raith eLine electron Beam Lithography System taoshang@illinois.edu 364 MRL
Temescal Ebeam Evaporator 2 taoshang@illinois.edu MRL 348
Temescal Ebeam Evaporator 4 taoshang@illinois.edu MRL 348
Neaspec NanoFTIR/NIM AFM, SSNOM soares@illinois.edu 0022 Supercon
Nanophoton Raman 11 soares@illinois.edu 0022 Supercon
Keyence VK-X1000 3D Laser Scanning Confocal Microscope soares@illinois.edu 0022 Supercon
Zeiss Axiovert soares@illinois.edu 0022 Supercon