Equipment List

Equipment Name Contactsort descending Location Technique(s)
High Temperature CM furnace – max temperature 1600°C frao@illinois.edu 328 MRL
Optical Microscopes with CCD cameras frao@illinois.edu 326 MRL
Lindberg 2" Tube oxidation/annealing furnace frao@illinois.edu 328 MRL
AJA Orion-8 Magnetron Sputtering System frao@illinois.edu 336 MRL
Jandel 4-Point Probe Sheet Resistance Measurement frao@illinois.edu 326 MRL
6" Tube oxidation furnace frao@illinois.edu 328 MRL
Savannah S100 Atomic Layer Deposition Cambridge Nanotech frao@illinois.edu 326 MRL
AJA Orion-8 Sputtering System for Magnetic Materials frao@illinois.edu 336 MRL
4155c Semiconductor Parameter Analyzer (Agilent), used with Lake Shore and custom probe station frao@illinois.edu 326 MRL
Bench Top Probe Station (Custom) frao@illinois.edu 326 MRL
FEI Strata Dual Beam 235 SEM/FIB hhzhou@illinois.edu B62 MRL
Thermo Scios2 Dual-Beam SEM/FIB hhzhou@illinois.edu B58 MRL
FEI Helios 600i Dual Beam SEM/FIB hhzhou@illinois.edu B58 MRL
Piuma Nanoindenter jcspear@illinois.edu 248 MRL
Hysitron TI-950 TriboIndenter jcspear@illinois.edu 0013 Supercon
Spin Coater Systems (Headway Research) jeffg@illinois.edu 313 MRL
Heidelberg MLA150 aligner for maskless photolithography jeffg@illinois.edu 388 MRL
Nanoscribe Photonic Professional GT 3D Printer jeffg@illinois.edu 335 MRL
UV 365 nm Exposure System (Oriel) jeffg@illinois.edu 313 MRL
Yield Engineering P-I Curing Ovens jeffg@illinois.edu 313 MRL
Yield Engineering HMDS Vapor Prime Oven jeffg@illinois.edu 313 MRL
MJB4 Mask Aligner jeffg@illinois.edu 313 MRL
MJB3 Mask Aligner + Stamper Tool jeffg@illinois.edu 313 MRL
Asylum Research MFP-3D AFM kawalsh@illinois.edu 0014 Supercon
Anton Paar Tosca 400 kawalsh@illinois.edu 0014 Supercon
Sloan Dektak3ST kawalsh@illinois.edu B80 MRL
Asylum Research Cypher STM kawalsh@illinois.edu 0014 Supercon
Asylum Research Cypher kawalsh@illinois.edu 0014 Supercon
JEOL 7000F Analytical SEM mabon@illinois.edu 0020 Supercon
FEI Themis Z Advanced Probe Aberration Corrected Analytical TEM/STEM mabon@illinois.edu B66 MRL