Equipment List

Equipment Name Contactsort descending Location Technique(s)
Syntron vibratory polishers (two identical pieces) cqchen@illinois.edu 0015 Supercon
TechCut 4 Precision Low Speed Saw cqchen@illinois.edu MRL B56
GATAN Cryo Precision Ion Polishing System (Cryo-PIPS) cqchen@illinois.edu B59 MRL
Polaron Carbon String Coater cqchen@illinois.edu B59 MRL
GATAN Precision Ion Polishing System (PIPS) cqchen@illinois.edu B59 MRL
Allied MultiPrep System cqchen@illinois.edu B56 MRL
Hysitron P195 In-Situ TEM Picoindenter cqchen@illinois.edu 0011 Supercon
Au-Pd Sputter Coater - Emscope SC 500 cqchen@illinois.edu 0021 Supercon
Au-Pd Sputter Coater - Emitech K575 cqchen@illinois.edu 0018 Supercon
JEOL 2010F S(TEM) cqchen@illinois.edu 0026 Supercon
Cressington Carbon Coater 108carbon/A cqchen@illinois.edu B59 MRL
Fischione 1020 plasma cleaner cqchen@illinois.edu B70 MRL
Other Polishers cqchen@illinois.edu B56 MRL, 0015 Supercon
Gatan 656 Disc Grinder System cqchen@illinois.edu B56 MRL
Gatan 656 Dimple Grinder cqchen@illinois.edu B56 MRL
Well 3241 Precision Diamond Wire Saw cqchen@illinois.edu B56 MRL
Gatan Precision Etching Coating System (PECS) cqchen@illinois.edu B59
Allied TechCut 4™ Precision Low Speed Saw cqchen@illinois.edu B56 MRL
MRI 150 low speed diamond blade saw cqchen@illinois.edu B56 MRL
Wedge Bonder (25 um Aluminum wire, K&S 4523A) frao@illinois.edu 326 MRL
Ball Bonder (25 um Gold wire, K&S 4524A) frao@illinois.edu 326 MRL
Vacuum furnace – max temperature 1050°C frao@illinois.edu 322 MRL
Box furnace – max temperature 900°C frao@illinois.edu 328 MRL
Rapid Thermal Annealing furnace (Custom) – max temperature 1000°C frao@illinois.edu 328 MRL
Commonwealth Scientific Ion Milling & Thermal Evaporator System frao@illinois.edu 334 MRL
Optical Microscopes with CCD cameras frao@illinois.edu 326 MRL
High Temperature CM furnace – max temperature 1600°C frao@illinois.edu 328 MRL
Jandel 4-Point Probe Sheet Resistance Measurement frao@illinois.edu 326 MRL
Lindberg 2" Tube oxidation/annealing furnace frao@illinois.edu 328 MRL
6" Tube oxidation furnace frao@illinois.edu 328 MRL