Equipment List

Equipment Name Contact Locationsort ascending Technique(s)
Solvent Fume Hood or Developer Fume Hood xlwang84@illinois.edu 384 MRL
Raith eLine electron Beam Lithography System taoshang@illinois.edu 364 MRL
Acid Fume Hood xlwang84@illinois.edu 359 MRL
AJA E-beam evaporator 1 taoshang@illinois.edu 348 MRL
Plasma-Therm Plasma Enhanced Chemical Vapor Deposition System (PECVD) xlwang84@illinois.edu 342 MRL
Plasma-Therm 790 MF Reactive Ion Etch (RIE) Plasma System xlwang84@illinois.edu 342 MRL
Nano-Master Reactive Ion Etch (RIE) Plasma System xlwang84@illinois.edu 342 MRL
Nordson March Reactive Ion Etch (RIE) Plasma System 1 & 2 xlwang84@illinois.edu 342 MRL
AJA Orion-8 Magnetron Sputtering System frao@illinois.edu 336 MRL
AJA ATC2000 Sputter Coater 1 taoshang@illinois.edu 336 MRL
AJA Orion-8 Sputtering System for Magnetic Materials frao@illinois.edu 336 MRL
Commonwealth Scientific Ion Milling & Thermal Evaporator System frao@illinois.edu 334 MRL
6" Tube oxidation furnace frao@illinois.edu 328 MRL
Lindberg 2" Tube oxidation/annealing furnace frao@illinois.edu 328 MRL
High Temperature CM furnace – max temperature 1600°C frao@illinois.edu 328 MRL
Rapid Thermal Annealing furnace (Custom) – max temperature 1000°C frao@illinois.edu 328 MRL
Box furnace – max temperature 900°C frao@illinois.edu 328 MRL
Kurt J. Lesker Nano36 Thermal Evaporator System xlwang84@illinois.edu 326 MRL
Savannah S100 Atomic Layer Deposition Cambridge Nanotech frao@illinois.edu 326 MRL
Ball Bonder (25 um Gold wire, K&S 4524A) frao@illinois.edu 326 MRL
Wedge Bonder (25 um Aluminum wire, K&S 4523A) frao@illinois.edu 326 MRL
Temperature-Controlled Cryogenic Vacuum Probe Station frao@illinois.edu 326 MRL
Bench Top Probe Station (Custom) frao@illinois.edu 326 MRL
4155c Semiconductor Parameter Analyzer (Agilent), used with Lake Shore and custom probe station frao@illinois.edu 326 MRL
Jandel 4-Point Probe Sheet Resistance Measurement frao@illinois.edu 326 MRL
Optical Microscopes with CCD cameras frao@illinois.edu 326 MRL
AJA Orion 3 Sputter Coater 2 taoshang@illinois.edu 326 MRL
Harrick Plasma Oxygen Cleaner xlwang84@illinois.edu 326 MRL
Hydrogen Vacuum Furnace – Max Temp. 1000°C frao@illinois.edu 322 MRL
Graphene Furnace – Max Temp. 1050°C frao@illinois.edu 322 MRL