Equipment List

Equipment Name Contact Locationsort ascending Technique(s)
FEI Vitrobot Mark III wswiech@illinois.edu MRL B59
TechCut 4 Precision Low Speed Saw cqchen@illinois.edu MRL B56
Temescal Ebeam Evaporator 4 taoshang@illinois.edu MRL 348
Temescal Ebeam Evaporator 2 taoshang@illinois.edu MRL 348
Kratos Axis ULTRA r-haasch@illinois.edu B81 MRL
Sloan Dektak3ST kawalsh@illinois.edu B80 MRL
JEOL 2200 FS (S)TEM mabon@illinois.edu B70C MRL
Fischione 1020 plasma cleaner cqchen@illinois.edu B70 MRL
Hitachi H-9500 Dynamic Environmental TEM mabon@illinois.edu B66A MRL
FEI Themis Z Advanced Probe Aberration Corrected Analytical TEM/STEM mabon@illinois.edu B66 MRL
FEI Strata Dual Beam 235 SEM/FIB hhzhou@illinois.edu B62 MRL
GATAN Precision Ion Polishing System (PIPS) cqchen@illinois.edu B59 MRL
GATAN Cryo Precision Ion Polishing System (Cryo-PIPS) cqchen@illinois.edu B59 MRL
Cressington Carbon Coater 108carbon/A cqchen@illinois.edu B59 MRL
Polaron Carbon String Coater cqchen@illinois.edu B59 MRL
Gatan Precision Etching Coating System (PECS) cqchen@illinois.edu B59
FEI Helios 600i Dual Beam SEM/FIB hhzhou@illinois.edu B58 MRL
Thermo Scios2 Dual-Beam SEM/FIB hhzhou@illinois.edu B58 MRL
Other Polishers cqchen@illinois.edu B56 MRL, 0015 Supercon
Allied MultiPrep System cqchen@illinois.edu B56 MRL
MRI 150 low speed diamond blade saw cqchen@illinois.edu B56 MRL
Allied TechCut 4™ Precision Low Speed Saw cqchen@illinois.edu B56 MRL
Well 3241 Precision Diamond Wire Saw cqchen@illinois.edu B56 MRL
Gatan 656 Dimple Grinder cqchen@illinois.edu B56 MRL
Gatan 656 Disc Grinder System cqchen@illinois.edu B56 MRL
Physical Electronics 5400 r-haasch@illinois.edu B08 MRL
Physical Electronics 660 r-haasch@illinois.edu B06 MRL
Physical Electronics Trift III tspila@illinois.edu B04 MRL
Cameca LEAP 5000XS Atom Probe Tomography tspila@illinois.edu B01 MRL
Metal Etchant Fume Hood xlwang84@illinois.edu 387 MRL