|
4155c Semiconductor Parameter Analyzer (Agilent), used with Lake Shore and custom probe station |
frao@illinois.edu |
326 MRL |
Probe Stations |
|
6" Tube oxidation furnace |
frao@illinois.edu |
328 MRL |
Diffusion / Annealing Furnaces |
|
Acid Fume Hood |
xlwang84@illinois.edu |
359 MRL |
Wet Processing |
|
AJA ATC2000 Sputter Coater 1 |
taoshang@illinois.edu |
336 MRL |
Deposition Tools |
|
AJA Orion 3 Sputter Coater 2 |
taoshang@illinois.edu |
326 MRL |
Deposition Tools |
|
AJA Orion-8 Magnetron Sputtering System |
frao@illinois.edu |
336 MRL |
Deposition Tools |
|
Allied MultiPrep System |
cqchen@illinois.edu |
B56 MRL |
EM Support Instruments |
|
Allied TechCut 4™ Precision Low Speed Saw |
cqchen@illinois.edu |
B56 MRL |
EM Support Instruments |
|
Asylum Research Cypher |
kawalsh@illinois.edu |
0014 Supercon |
Atomic Force Microscopy (AFM) |
|
Asylum Research Cypher STM |
kawalsh@illinois.edu |
0014 Supercon |
Scanning Tunneling Microscopy (STM) |
|
Asylum Research MFP-3D AFM |
kawalsh@illinois.edu |
0014 Supercon |
Atomic Force Microscopy (AFM) |
|
Au-Pd Sputter Coater - Emitech K575 |
cqchen@illinois.edu |
0018 Supercon |
EM Support Instruments |
|
Au-Pd Sputter Coater - Emscope SC 500 |
cqchen@illinois.edu |
0021 Supercon |
EM Support Instruments |
|
Ball Bonder (25 um Gold wire, K&S 4524A) |
frao@illinois.edu |
326 MRL |
Bonding Stations |
|
Bench Top Probe Station (Custom) |
frao@illinois.edu |
326 MRL |
Probe Stations |
|
Box furnace – max temperature 900°C |
frao@illinois.edu |
328 MRL |
Diffusion / Annealing Furnaces |
|
Cameca ims 5f |
tspila@illinois.edu |
B01 MRL |
Secondary Ion Mass Spectrometry |
|
Commonwealth Scientific Ion Milling & Thermal Evaporator System |
frao@illinois.edu |
334 MRL |
Dry Etching |
|
Cressington Carbon Coater 108carbon/A |
cqchen@illinois.edu |
B59 MRL |
EM Support Instruments |
|
CVD Graphene/Carbon Nanotube Growth Furnace – Max Temp. 1050°C |
frao@illinois.edu |
322 MRL |
Diffusion / Annealing Furnaces |
|
Discovery 2500 Differential Scanning Calorimeter (DSC) |
tspila@illinois.edu |
133 MRL |
Materials Properties Measurement |
|
FEI Helios 600i Dual Beam SEM/FIB |
hhzhou@illinois.edu |
B58 MRL |
Focused Ion Beam (FIB) |
|
FEI Strata Dual Beam 235 SEM/FIB |
hhzhou@illinois.edu |
B62 MRL |
Focused Ion Beam (FIB) |
|
FEI Themis Z Advanced Probe Aberration Corrected Analytical TEM/STEM |
mabon@illinois.edu |
B66 MRL |
Transmission and Scanning Transmission Electron Microscopy (TEM/STEM) |
|
FEI Vitrobot Mark III |
wswiech@illinois.edu |
MRL B59 |
EM Support Instruments |
|
Fischione 1020 plasma cleaner |
cqchen@illinois.edu |
B70 MRL |
EM Support Instruments |
|
Gaertner L116C |
soares@illinois.edu |
248 MRL |
Ellipsometry |
|
Gatan 656 Dimple Grinder |
cqchen@illinois.edu |
B56 MRL |
EM Support Instruments |
|
Gatan 656 Disc Grinder System |
cqchen@illinois.edu |
B56 MRL |
EM Support Instruments |
|
GATAN Cryo Precision Ion Polishing System (Cryo-PIPS) |
cqchen@illinois.edu |
B59 MRL |
Transmission and Scanning Transmission Electron Microscopy (TEM/STEM) |
