Electron Microscopy
The electron microscopy suite at MRL boasts a wide range of techniques, from Scanning Electron Microscopy (SEM) and dual-beam Focused Ion Beam (FIB), to Transmission Electron Microscopy (TEM) and Scanning Transmission Electron Microscopy (STEM). A variety of sample preparation tools for electron microscopy is also available.
Techniques
EM Support Instruments
Variety of tools for microscopy sample preparation.Focused Ion Beam (FIB)
Dual-beam Focused Ion Beam (FIB) is a combination of a high-resolution field emission scanning electron microscope (FE-SEM) and a scanning metal ion beam microscope. It provides significant new capabilities for microscopic imaging, nanofabrication, and site-selective TEM sample preparation.Scanning Electron Microscopy (SEM)
SEM is generally used to study topography, morphology and local chemical and phase composition on the scale of nanometers to millimeters.Transmission and Scanning Transmission Electron Microscopy (TEM/STEM)
Determine the microstructure of materials such as grain size, defect density and type, and dislocation distribution; study the local microstructure including heterointerface and individual nanostructures; examine crystalline and amorphous structures; determine the composition of materials from micrometer level down to atomic level.Equipment in this Core
| Equipment Name | Contact | Location | Technique(s) |
|---|---|---|---|
| Allied MultiPrep System | cqchen@illinois.edu | B56 MRL | EM Support Instruments |
| Allied TechCut 4™ Precision Low Speed Saw | cqchen@illinois.edu | B56 MRL | EM Support Instruments |
| Au-Pd Sputter Coater - Emitech K575 | cqchen@illinois.edu | 0018 Supercon | EM Support Instruments |
| Au-Pd Sputter Coater - Emscope SC 500 | cqchen@illinois.edu | 0021 Supercon | EM Support Instruments |
| Cressington Carbon Coater 108carbon/A | cqchen@illinois.edu | B59 MRL | EM Support Instruments |
| FEI Helios 600i Dual Beam SEM/FIB | hhzhou@illinois.edu | B58 MRL | Focused Ion Beam (FIB) |
| FEI Strata Dual Beam 235 SEM/FIB | hhzhou@illinois.edu | B62 MRL | Focused Ion Beam (FIB) |
| FEI Themis Z Advanced Probe Aberration Corrected Analytical TEM/STEM | mabon@illinois.edu | B66 MRL | Transmission and Scanning Transmission Electron Microscopy (TEM/STEM) |
| FEI Vitrobot Mark III | wswiech@illinois.edu | MRL B59 | EM Support Instruments |
| Fischione 1020 plasma cleaner | cqchen@illinois.edu | B70 MRL | EM Support Instruments |
| Gatan 656 Dimple Grinder | cqchen@illinois.edu | B56 MRL | EM Support Instruments |
| Gatan 656 Disc Grinder System | cqchen@illinois.edu | B56 MRL | EM Support Instruments |
| GATAN Cryo Precision Ion Polishing System (Cryo-PIPS) | cqchen@illinois.edu | B59 MRL | Transmission and Scanning Transmission Electron Microscopy (TEM/STEM) |
| Gatan Precision Etching Coating System (PECS) | cqchen@illinois.edu | B59 | EM Support Instruments |
| GATAN Precision Ion Polishing System (PIPS) | cqchen@illinois.edu | B59 MRL | Transmission and Scanning Transmission Electron Microscopy (TEM/STEM) |
| Hitachi H-9500 Dynamic Environmental TEM | mabon@illinois.edu | B66A MRL | Transmission and Scanning Transmission Electron Microscopy (TEM/STEM) |
| Hitachi S-4700 High Resolution SEM | zyw@illinois.edu | 0018 Supercon | Scanning Electron Microscopy (SEM) |
| Hitachi S-4800 High Resolution SEM | zyw@illinois.edu | 0013 Supercon | Scanning Electron Microscopy (SEM) |
| Hysitron P195 In-Situ TEM Picoindenter | cqchen@illinois.edu | 0011 Supercon | EM Support Instruments |
| JEOL 2010 LAB6 TEM | wswiech@illinois.edu | 0017 Supercon | Transmission and Scanning Transmission Electron Microscopy (TEM/STEM) |
| JEOL 2010F S(TEM) | cqchen@illinois.edu | 0026 Supercon | Transmission and Scanning Transmission Electron Microscopy (TEM/STEM) |
| JEOL 2100 CRYO TEM | wswiech@illinois.edu | 0011 Supercon | Transmission and Scanning Transmission Electron Microscopy (TEM/STEM) |
| JEOL 2200 FS (S)TEM | mabon@illinois.edu | B70C MRL | Transmission and Scanning Transmission Electron Microscopy (TEM/STEM) |
| JEOL 7000F Analytical SEM | mabon@illinois.edu | 0020 Supercon | Scanning Electron Microscopy (SEM) |
| JEOL JSM-6060LV Low-Vacuum SEM | zyw@illinois.edu | 0021 Supercon | Scanning Electron Microscopy (SEM) |
| MRI 150 low speed diamond blade saw | cqchen@illinois.edu | B56 MRL | EM Support Instruments |
| Other Polishers | cqchen@illinois.edu | B56 MRL, 0015 Supercon | EM Support Instruments |
| Polaron Carbon String Coater | cqchen@illinois.edu | B59 MRL | EM Support Instruments |
| Syntron vibratory polishers (two identical pieces) | cqchen@illinois.edu | 0015 Supercon | EM Support Instruments |
| TechCut 4 Precision Low Speed Saw | cqchen@illinois.edu | MRL B56 | EM Support Instruments |
| Thermo Scios2 Dual-Beam SEM/FIB | hhzhou@illinois.edu | B58 MRL | Focused Ion Beam (FIB) |
| Well 3241 Precision Diamond Wire Saw | cqchen@illinois.edu | B56 MRL | EM Support Instruments |