Illinois
Illinois MRL
Materials
Research Laboratory
Materials
Research Laboratory
At Illinois

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      • Electron Microscopy
        • Scanning Electron Microscopy (SEM)
        • Focused Ion Beam (FIB)
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        • EM Support Instruments
      • Laser and Spectroscopy
        • Contact Angle Goniometry
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        • Deposition Tools
        • Dry Etching
        • Wet Processing
        • Lithography
        • Diffusion / Annealing Furnaces
        • Bonding Stations
        • Additional Micro/Nanofabrication Resources
        • Probe Stations
        • MRL Microfab Clean Room
      • Scanning Probe Microscopy
        • Atomic Force Microscopy (AFM)
        • Scanning Tunneling Microscopy (STM)
        • Nanoindentation
      • Surface Analysis
        • Auger Electron Spectroscopy
        • Accelerator-based Techniques
        • Secondary Ion Mass Spectrometry
        • X-Ray Photoelectron Spectroscopy
        • Surface Profilometry
      • Thermal Analysis & Soft Materials Characterization
        • Materials Properties Measurement
      • X-Ray Analysis
        • X-Ray Diffraction (XRD) and Scattering
        • Data Analysis Software Packages
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      • Mask Fabrication Services
        • MRL Photomask Services Online Payments
      • Equipment coming soon to MRL
    • Equipment List
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      • University of Illinois (All Campuses) Users
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      • Central Research Facility Use Acknowledgement
    • Usage Rates
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    • Facility Guide
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      • Standard Acknowledgement of Support
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      • Key Requests
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    • ESCO Project Updates
      • Facilities Lab Closures
      • Temporary MicroFab Cleanroom and Instruments Relocation
    • Facilities Updates
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    • Current Calendar
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  • News
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  • Facilities
    • Research Cores
      • Electron Microscopy
        • Scanning Electron Microscopy (SEM)
        • Focused Ion Beam (FIB)
        • Transmission and Scanning Transmission Electron Microscopy (TEM/STEM)
        • EM Support Instruments
      • Laser and Spectroscopy
        • Contact Angle Goniometry
        • Ellipsometry
        • Light Sources
        • Spectroscopy
        • Microscopy
      • Micro/Nano Fabrication and Cleanroom
        • Deposition Tools
        • Dry Etching
        • Wet Processing
        • Lithography
        • Diffusion / Annealing Furnaces
        • Bonding Stations
        • Probe Stations
        • Additional Micro/Nanofabrication Resources
        • MRL Microfab Clean Room
      • Scanning Probe Microscopy
        • Atomic Force Microscopy (AFM)
        • Scanning Tunneling Microscopy (STM)
        • Nanoindentation
      • Surface Analysis
        • Auger Electron Spectroscopy
        • Accelerator-based Techniques
        • Secondary Ion Mass Spectrometry
        • X-Ray Photoelectron Spectroscopy
        • Surface Profilometry
      • Thermal Analysis & Soft Materials Characterization
        • Materials Properties Measurement
      • X-Ray Analysis
        • X-Ray Diffraction (XRD) and Scattering
        • Data Analysis Software Packages
      • Bio Services
      • Mask Fabrication Services
        • MRL Photomask Services Online Payments
      • Equipment coming soon to MRL
    • Equipment List
    • Become a User
      • University of Illinois (All Campuses) Users
      • Non-University of Illinois Academic and Government Agency Users
      • Business or Industrial Users (Includes UI Enterprise Works)
      • Central Research Facility Use Acknowledgement
    • Usage Rates
    • Schedule an Instrument
    • Facility Guide
      • Submit Requisition
      • Grant Proposal Instructions
      • Standard Acknowledgement of Support
      • Building Emergency Contacts
      • Key Requests
      • Meeting Room Reservations
      • BEAP Training Instructions
    • Resources
      • Storeroom
      • Machine Shop
      • Information Technology
    • ESCO Project Updates
      • Facilities Lab Closures
      • Temporary MicroFab Cleanroom and Instruments Relocation
    • Facilities Updates
  • Research
    • Research Programs
    • Start Your Research
    • Grant Proposal Instructions
  • Safety
    • Safety Contact
    • Safety Training
    • Laser Safety Guides
    • Safety Newsletters
    • Safety Services for MRL Groups
    • BEAP Training Instructions
  • Directory
    • Faculty
    • All Staff
    • MRL Staff Scientists
    • Service Areas and Offices
    • Contact Us
  • About Us
  • Events
    • Current Calendar
    • Themis Inauguration
    • Conferences and Workshops
  • News
  • My.Mrl
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Primary Equipment Contact For:

  • Kratos Axis ULTRA
  • Physical Electronics 5400
  • Physical Electronics 660
MATERIALS RESEARCH LAB
University of Illinois at Urbana-Champaign
104 South Goodwin Ave MC 230
Urbana, IL 61801, USA

P: (217) 333-1370  |   F: (217) 244-2278 
General email: mrl@illinois.edu
Webmaster: engrit-web@illinois.edu
 
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