Auger Electron Spectroscopy

Auger electron spectroscopy (AES) is a surface sensitive analytical technique used mainly to determine elemental compositions of materials and, in certain cases to identify the chemical states of surface atoms. With AES, a primary electron beam is used to excite secondary and Auger electrons. If a scanning primary beam is used, the secondary electron images yield information related to surface topography. Auger electrons, when analyzed as a function of energy, are used to identify the elements and chemical states present. The information depth for Auger analysis is the top 2-20 atomic layers, and can be used in depth profiling applications in conjunction with ion beam sputtering.