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Auger Electron Spectroscopy

Auger electron spectroscopy (AES) is a surface sensitive analytical technique used mainly to determine elemental compositions of materials and, in certain cases to identify the chemical states of surface atoms. With AES, a primary electron beam is used to excite secondary and Auger electrons. If a scanning primary beam is used, the secondary electron images yield information related to surface topography. Auger electrons, when analyzed as a function of energy, are used to identify the elements and chemical states present. The information depth for Auger analysis is the top 2-20 atomic layers, and can be used in depth profiling applications in conjunction with ion beam sputtering.

Equipment Name Contact Location
Equipment Name Contact Location
Physical Electronics 660 r-haasch B06 MRL

The Physical Electronics model PHI 660 Scanning Auger Microprobe (SAM) has elemental mapping with high spatial resolution and is capable of performing scanning electron microscopy (SEM). The instrument is equipped with an in situ impact fracture stage for analysis of grain boundaries and other internal surfaces. Auger point analysis and scanning analysis can be performed with a spatial resolution down to 250 nm, while SEM resolution is around 100 nm. The Auger has a sputter ion gun for depth profiling analysis.

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