Mask Fabrication Services

Thank you very much for being a valuable customer of our mask fabrication services here in the Materials Research Laboratory at the University of Illinois at Urbana-Champaign. We regret to inform you that effective September 1st, 2021 we will no longer be offering this service. The last day for us to accept mask orders is August 31, 2021.

Most of our customers have or are in the process of moving to maskless processes for device fabrication with no need for photomasks. Over the past year we have added a Heidelberg MLA150 maskless writer to our cleanroom/fab core of shared instrumentation and we would like to encourage you to consider using that tool for your lithography needs. The maskless process offers a non-contact, economic and very high speed compared to mask-based processes. For instance, full areas of 200 mm x 200 mm with features down to 1 micron can be exposed in only 36 minutes. Details on that instrument and capability can be found here: https://mrl.illinois.edu/facilities/equipment/heidelberg-mla150-aligner-maskless-photolithography

In order to become a user of our maskless writer – or any other equipment or facilities in our cleanroom in the MRL shared instrumentation – please contact us or visit the web site: https://mrl.illinois.edu/facilities/become-user

The MRL shared facilities are available to users on 24/7 basis, with training of users or staff-assisted work in the facilities available during regular business hours.

Please do not hesitate to contact us if you have any questions.

 

MRL Photomask Services are offered to the University of Illinois MRL Central Research Facliity community and also to external customers from both academia and industry. Our full services include imaging of data on photo sensitive glass.

You supply data in Microns only. All data must be in the positive quadrant from 0, 0. File format in either .DXF or .GDS.

Turnaround time is typically 1 working day after data is verified and accepted by the user.

Pattern Generation: 
Minimum line width: 1.5 microns

We offer 3x3, 4x4 and 5x5 FeO Soda Lime plates, and 4x4 and 5x5 Chrome Soda Lime plates. We do not stock quartz glass, but will image if supplied by the user. We ship photomasks by USPS Priority Mail to our outside customers.

MRL 2021 Photomask Services Pricing

Photomask Online Payments

Photomask Tutorial

Contact

For more information about MRL Photomask Services, please contact:
Jeff Grau
Room 380 MRL
Email: photomasks@mrl.illinois.edu