MRL Microfab Cleanroom Training and Access Procedure

The process to gain cleanroom access may take up to 4 weeks depending upon training session availability (especially during school breaks). Please plan ahead!

1. SUBMIT YOUR PROPOSAL ONLINE

Submit your new or change-of-scope proposal using the MRL online system at http://mrl.illinois.edu/becoming-userA change-of-scope proposal should be submitted instead of a new proposal if you already have a user number, are working on the same project, and you have not changed your PI/advisor.

2. COMPLETE BASIC SAFETY TRAINING ONLINE (only need to do this once)

Complete the following UI Division of Research Safety (DRS) online training modules: Laboratory Safety and Chemical Safety: An Introduction at http://www.drs.illinois.edu . Save print or electronic copies of your DRS certificates to bring to Orientaion. If you are an external user, please email microfabstaff@mrl.illinois.edu for a DRS login and password. 

3. ATTEND MRL RESEARCHER ORIENTATION (only need to do this once)

All on-campus researchers who are new to the MRL Central Research Facilities are required to attend an MRL Orientation session. You will learn how to work safely and effectively in the MRL Central Research Facilities, how to request training, and how to schedule sessions. Bring copies of your DRS certificates (paper or electronic) AND your University I-Card to be admitted to the session.
MRL Orientation Schedule  

4. REVIEW THE MRL BUILDING EMERGENCY ACTION PLAN (BEAP) (annually required)

Safety is a top priority in MRL. We require all users of our facility to be trained annually on our BEAP. BEAP instructions: http://go.illinois.edu/MRLBEAP 

5. COMPLETE ADDITIONAL ONLINE SAFETY TRAINING FOR CLEANROOM USERS

Log into Illinois Compass 2g with your net ID and password: https://compass2g.illinois.edu  
Choose: "TRAINING - Materials Research Lab Orientation"

GENERAL SAFETY TRAINING
Choose: "DRS online safety training" (Step 1 link at the bottom of the page)

Choose: "UIUC Laboratory Safety Guide" (Step 2 link at the bottom of the page)

  1. Read the Laboratory Safety Guide and take the quiz.

CLEANROOM SAFETY TRAINING

Choose "Cleanroom safety training" from the left menu.

  1. Select: Hydrofluoric Acid Training. Complete and upload certificate.
  2. Select: Hazard Communication (Right-To-Know). Complete and upload certificate.

6. MEET WITH STAFF

Before Fab Approval is given, you must meet with staff to discuss your project. You may need to speak with more than one staff member depending on the scope of your proposed work. You will not be able to request training without Fab Approval.

Open office hours are three times each week:

Wednesday 10 am - 11 am in 380 MRL (Xiaoli Wang: email xlwang84@illinois.edu to confirm)
Wednesday 11 am - 12 noon in 380 MRL (Xiaoli Wang: email xlwang84@illinois.edu to confirm)
Thursday 4:30 pm - 5:30 pm in 380 MRL (Tao Shang)

7. REQUEST CLEANROOM TRAINING

Once Fab approval is given, cleanroom training may be requested using the link: http://cmmserv.mrl.illinois.edu/schedule/login.asp

  1. Under LOGIN: Select the instrument 'Cleanroom' from the drop-down list
  2. Type in your user ID and password, then click the button marked 'Request Training'
  3. In the next page, fill in the responses to questions, then click 'Submit Request'

8. ATTEND CLEANROOM ORIENTATION AND THE PROCESS MODULE LECTURES

Cleanroom Orientation sessions are normally scheduled twice a month, from 3-5 PM.
Orientation and Process Module Lecture Schedule

Depending on your cleanroom and microfabrication experience, you may be required to take a short sequence of training modules covering three basic process areas:

  • lithography
  • deposition
  • etching

The training modules are offered twice a month, following cleanroom orientation sessions and are comprised of 1.5-hour lectures.

Technique / Required Process Module Lecture(s)

Cleanroom: photolithography / Cleanrom Orientation & Lithography & Etching
Cleanroom: wet chemistry / Cleanroom Orientation & Lithography & Etching
Cleanroom: e-Beam lithography / Cleanroom Orientation & Lithography & Etching
Atomic Layer Deposition (ALD) / Deposition
Vacuum Deposition: e-Beam evaporation / Deposition
Vacuum Deposition: thermal evaporation / Deposition
Vacuum Deposition: sputtering / Deposition
PECVD: Oxide/Nitride deposition / Deposition
Reactive Ion Etching (polymers) / Etching
Reactive Ion Etching (metals) / Etching

No fab process modules are required for: Wire bonding, Diffusion/Annealing furnaces, Optical microscopy, Probe station or Glovebox.

9. OBTAIN CLEANROOM ACCESS AND MASK ALIGNER TRAINING

Once the above requirements have been met, permissions to use the cleanroom will be given. Instructions will be given for obtaining i-card access as well as mask aligner and spin coater training.

The facility is evolving and changes are being made continuously, thus you may be required to attend further training to keep up-to-date on the latest procedures and practices in the facility.