Micro/Nanofabrication Instruments

The Micro/Nanofabrication Facility offers:

MRL Microfab Clean Room

Deposition Tools

Dry Etching Tools

Wet Processing

Lithograhy Tools

  • NanoScribe 3D Printer
  • Spin Coater Systems (Headway Research): quantity 2; (Specialty Coatings): quantity 1
  • MJB3 Mask Aligner (Suss Microtech): quantity 3
  • MJB3 Stamper Tool( Suss Microtech): quantity 1
  • MJB4 Mask Aligner (Suss Microtech): quantity 1
  • Yield Engineering  HMDS Vapor Prime Oven: quantity 1
  • Yield Engineering P-I Curing Ovens: quantity 2
  • UV 365 nm Exposure System (Oriel)
  • Nano engineering workstation (eLine RAITH)

Diffusion/Annealing Furnaces

  • 6" Tube oxidation furnace – max temperature 1100oC
  • 2" Tube oxidation/annealing furnace – max temperature 1000oC
  • High Temperature CM furnace – max temperature 1600oC
  • Rapid Thermal Annealing furnace (Custom) – max temperature 1000oC
  • Box furnace – max temperature 900oC
  • Vacuum furnace – max temperature 1050oC
  • CVD Graphene/Carbon nanotube growth furnace – max temperature 1050oC

Bonding Stations

  • Ball Bonder (25 um Gold wire, K&S 4524A)
  • Wedge Bonder (25 um Aluminum wire, K&S 4523A)

Probe Stations

Other Resources

Contact microfabstaff@mrl.illinois.edu for training or other inquiries.