Micro/Nanofabrication Instruments

The Micro/Nanofabrication Facility offers:

MRL Microfab Clean Room

Deposition Tools

Dry Etching Tools

Wet Processing

Lithograhy Tools

  • Spin Coater Systems (Headway Research): quantity 2; (Specialty Coatings): quantity 1
  • MJB3 Mask Aligner (Suss Microtech): quantity 3
  • MJB3 Stamper Tool( Suss Microtech): quantity 1
  • MJB4 Mask Aligner (Suss Microtech): quantity 1
  • Yield Engineering  HMDS Vapor Prime Oven: quantity 1
  • Yield Engineering P-I Curing Ovens: quantity 2
  • UV 365 nm Exposure System (Oriel)
  • Nano engineering workstation (eLine RAITH)

Diffusion/Annealing Furnaces

  • 6" Tube oxidation furnace
  • 2" Tube oxidation/annealing furnace
  • High Temperature CM furnace
  • Rapid Thermal Annealing furnace (Custom)
  • Box furnace
  • Vacuum furnace
  • CVD Graphene/Carbon nanotube growth furnace

Bonding Stations

  • Ball Bonder (25 um Gold wire, K&S 4524A)
  • Wedge Bonder (25 um Aluminum wire, K&S 4523A)

Probe Stations

  • Temperature Controlled Cryogenic Vacuum Probe Station (77K to 475K, Lake Shore, Model: FWPX)
  • Bench Top Probe Station (Custom)
  • 4155c Semiconductor Parameter Analyzer (Agilent), used with Lake Shore and custom probe station

Other Resources

  • Optical Microscopes with CCD cameras
  • Jandel 4-point probe sheet resistance measurement

Contact microfabstaff@mrl.illinois.edu for training or other inquiries.