Micro/Nanofabrication Facility

Users of the MRL Micro/Nanofabrication Facility have access to a multidisciplinary facility.
Users of the MRL Micro/Nanofabrication Facility have access to a multidisciplinary facility.

The MRL Micro/Nanofabrication Facility is a multidisciplinary, user-supported facility providing equipment and resources for deposition of thin film material and the fabrication of patterned micro- and nano-sized structures, including SQUIDs, MEMs, nanotube, flexible and other multi-layer electronic devices.

The facility operates a 1,400-square foot, class-100 cleanroom with a 400-square foot nano-science cleanroom that is integrated within more than 3,000-square feet of additional instrumentation and tools. The facility provides mulitple high-vacuum PVD and Etching systems combined with high precision optical lithography and e-beam lithography tools capable of 5 nanometer line resolution allowing state of the art pattern delineation and device fabrication.

Cleanroom Facility Layout

Cleanroom Training

Fall 2017 Annual Microfab Users Meeting Presentations:
Introduction (Mauro Sardela)
Cleanroom Rule Reminders (Xiaoli Wang)
Use of Spin Coater & Mask Aligners, Mask Service, and NanoScribe (Jeff Grau)
Ion Milling, Sputtering, Atomic Layer Deposition, Furnaces and Lab Protocols (Fubo Rao)
AJA Sputter Coater 2, Ebeam Evaporator 4 and Cleanroom Protocols (Tao Shang)
Proper Waste and Materials Disposal, and General Safety (Maisie Kingren)

Micro/Nanofabrication Facility Supplied Chemicals

Photomask Services