Coming Soon to the MRL

Instrumentation for FIB:

FEI Themis Z Advanced Probe Aberration Corrected Analytical TEM/STEM


B66 MRL Materials Research Laboratory

The FEI Themis Z is and advanced analytical scanning/transmission electron microscope (STEM/TEM) from Thermo Fisher Scientific Company that operates between the electron energy of 60 to 300 keV with a Schottky electron emitter, an electron energy monochromator, and a 5th order probe spherical aberration corrector. The microscope is additionally equipped for chemical analysis using highly efficient and fast electron energy loss spectroscopy (EELS) and energy dispersive X-ray spectroscopy (EDS) systems.

This instrument will meet the research needs of electron imaging and chemical analysis in materials research. Specifically, the microscope enables imaging and chemical mapping in 2D and 3D at atomic or nanoscales by providing following research capabilities: 1) performing low voltage spectral analysis for molecules and single atoms using EELS, 2) conducting ultra-sensitive mapping of local bonding and oxidation states using EELS, and 3) analysis of composition and crystallographic orientation in 2D and 3D using EDS.

Feature Highlights:

  • Acoustic enclosure and remote operation, enabling acoustic and temperature variation damping during operation
  • Accelerating voltage: 60 -300 kV
  • Electron source: High brightness Schottky field emission electron source (X-FEG)
  • Integrated electron source energy monochromator for beam energy widths to <150meV
  • Probe forming optics include an advanced 4th order (5th order optimized) spherical aberration corrector (DCOR)
  • Probe corrector tunings at 60, 80, and 300 kV
  • STEM resolution: ranging from <60pm at 300kV to  <120pm at 60 kV
  • Greater than 100 pA probe currents available in a 1 angstrom electron probe
  • High Angle Annular Dark Field (HAADF) detector and on-axis bright field/dark field STEM detector
  • Integrated Differential Phase Contrast (iDPC) for light element (low Z) imaging
  • Simultaneous collection of BF/ABF/DF and HAADF images on the system
  • TEM mode: information transfer of 60pm at 300kV to 100pm at 60kV
  • Gatan Quantum ER/965 GIF with Ultrafast Dual EELS (Electron Energy Loss Spectroscopy) Spectrum Imaging (1000 spectra/s, energy resolution of 150 meV or better)
  • 4-crystal EDS (Energy Dispersive Spectroscopy for X-Rays) detection system (FEI Super-X)
  • Large EDS collection solid angle of 0.7 steradians for atomic scale EDS analysis
  • EDS compatible with large sample rotation/tilt for 3D EDS tomography
  • Constant power magnetic lenses enabling faster mode and accelerating voltage changes switching by eliminating related thermal drift and providing high controllability and reproducibility
  • Automated tuning for the monochromator and corrector (OptiMono & OptiSTEM+)
  • Computerized 5-axes Piezo enhanced stage
  • High-speed, digital search-and-view camera
  • FEI Ceta 16M 16-megapixel digital camera for for imaging and diffraction applications
  • STEM & TEM tomography acquisition software and high field-of-view single-tilt tomography holder
  • Precession electron diffraction

Scios 2 DualBeam FIB-SEM


  • Fast and easy preparation of high-quality, site-specific, TEM and atom probe samples using the Sidewinder HT ion column and EasyLift™ system for precise milling and in-situ sample manipulation and lift-out.  To achieve the high-quality results, final polishing with low-energy ions is required to minimize surface damage on the sample. The Sidewinder HT provides high-resolution imaging and milling at high voltages, but has also good low-voltage performance (to 500V), enabling the creation of high-quality TEM lamella.
    Scios 2 DualBeam FIB-SEM System
    Scios 2 DualBeam FIB-SEM System
  • Ultra-high resolution SEM imaging using FEI’s NICol non-immersion field emission-SEM column electron column with excellent performance on a wide range of samples, including magnetic and non-conductive materials.  Beam currents of 1 pA to 400 nA and energies of 200V – 30kV.
  • A variety of integrated in-column and below-the-lens detectors. With its in-lens Trinity™ detection technology, the system is designed for simultaneous acquisition of angular and energy-selective SE and BSE imaging.
  • Flexible 5-axis motorized stage:
  • XY range: 110 mm, Z range: 65 mm, Rotation: 360° (endless), Tilt range: -15° to +90°,  XY repeatability: 3 μm, Max sample height: Clearance 85 mm to eucentric point, Max sample weight at 0° tilt: 2 kg (including sample holder), Max sample size: 110 mm with full rotation
  • IR camera for viewing sample and chamber and In-chamber Nav-Cam.
  • Artifact-free imaging and patterning with dedicated modes such as SmartScan™ (256 frame average or integration, line integration and averaging, interlaced scanning), Drift Compensated Frame Integration (DCFI), and Drift Suppression.
  • Deceleration mode imaging with landing energies to as low as 20eV
  • Platinum and Carbon deposition Gas Injection Systems for EBID and IBID
  • High-performance ion conversion and electron (ICE) detector for secondary ions (SI) and electrons (SE)
  • The Scios 2 offers user guidance, making it easy for novice users to be productive quickly. In addition, features such as “undo” and “redo” encourage greater experimentation with peace of mind.