Micro/Nano Fabrication and Cleanroom

The next generation 3D laser lithography system, MRL’s Nanoscribe sets new standards in 3D micro printing and maskless lithography. It combines two writing modes in one device: an ultra-precise piezo mode for arbitrary 3D trajectories and the high-speed galvo mode for fastest structuring in a layer-by-layer fashion.

Resources

Lithography uses light or electron beam to produce specific patterns on substrates during device fabrication. Photo- and electron-beam lithography facilities are available in the MRL through a series of mask aligners, stampers, ovens, two-photon sub-micron lithography 3D printing and an electron-beam lithography system.

Lithography Equipment

MicroFab provides the following solvents and developers for cleanroom users. The flow bench includes DI water, nigrogen gun, ultrasonic bath and hot plate.

Chemicals

SOLVENTS:

  • Acetone
  • IPA
  • SU-8 Developer
  • AZ 400T

DEVELOPERS:

  • AZ 400K Developer
  • AZ 917 MIF Developer

Processes

Surface Cleaning:

MRL provides the following metal etchants for cleanroom users:

  • Copper Etchant CE-100
  • Chromium Etchant 9057
  • Iron Oxide Mask Etchant ME-9028
  • Gold Etchant Type TFA

NOTE: A separate safety training must be completed before using this fume hood.

MRL provides the following acids for cleanroom users. This fume hood includes DI water, nitrogen gun and hot plate.

Chemicals

  • Hydrochloric Acid (HCl)Hydrofluoric Acid (HF)
  • Buffered Oxide Etch (BOE)
  • Nano-strip (replacment for piranha)
  • Nitric Acid (HNO3)
  • Phosphoric Acid (HP3O4)

Processes

Etching of dielectrics:

  • Etching of SiO2in BOE or HF
  • Etching of Si3N4in HP3O4
  • Thin film etching of TiO2, Al2O3and HFO2in HF mixture

Etching of metals:

Wet processing work in the MRL Cleanroom is supported by several fume hoods and flow benches for processes involving acids, solvent developer, and metal etchants.

Wet Processing Equipment

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