Micro/Nano Fabrication and Cleanroom

Bonding Stations Equipment

Box furnace – max temperature 900°C

Features:

  • Maximum temperature: 1000 oC.
  • Tube type and size: quartz tube, 2-inch inner diameter.
  • Gas: Nitrogen, Argon, or Oxygen. 0-10 SLPM.

Features:

  • Maximum temperature: 1600 oC.
  • Tube type and size: ceramic tube, 2-inch outer diameter.
  • Gas: Nitrogen, Argon, or Oxygen. 0-10 SLPM.

Features:

  • Maximum temperature: 1000 oC.
  • Tube type and size: quartz tube, 2-inch outer diameter.
  • Gas: Nitrogen, Argon, or Oxygen. 0-10 SLPM.

Features:

  • Maximum temperature: 1100 oC with 3 temperature zones.
  • Tube type and size: quartz tube, 6-inch outer diameter.
  • Gas: Nitrogen, Argon, or Oxygen. 0-10 SLPM.

Several furnaces covering a variety of temperature ranges under vacuum or various ambient conditions are available to carry out diffusion processes, dopant activation, ion-implantation damage repair, fabrication of graphene or carbon nanotubes, etc.

Diffusion / Annealing Furnaces Equipment

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