MRL Microfab Cleanroom Training and Access Procedure

The process to gain cleanroom access may take up to 4 weeks depending upon training session availability (especially during school breaks). Please plan ahead!

1. SUBMIT YOUR PROPOSAL

Submit your new or change-of-scope proposal using the MRL online system at http://mrl.illinois.edu/facilities/becoming-user . A change-of-scope proposal should be submitted instead of a new proposal if you already have a user number, are working on the same project, and you have not changed your PI/advisor.

2. ATTEND NEW USER ORIENTATION

All researchers who are new to the MRL Central Research Facilities are required to attend the MRL new researcher orientation to help you get started with research at MRL. The orientation session will take only 1.5 hours, and you will learn things such as: how to find your way around the facility, how to use the scheduling and training request system, and how to find answers to common questions about working in the facility.

The orientation schedule can be found in the link below.

Orientation and Process Module Lecture Schedule

3. TAKE SAFETY TRAINING

Take the following online Safety Training offered by the University’s Division of Research Safety (DRS). If you are an external user, please email microfabstaff@mrl.illinois.edu for DRS login and password information. Regardless of your previous cleanroom or laboratory experience, all prospective users are required to take the DRS online safety exams at http://www.drs.illinois.edu/ .

GENERAL LAB SAFETY TRAINING

  1. General Lab Safety
  2. Electrical Safety

CHEMICAL SAFETY TRAINING

  1. University of Illinois at Urbana-Champaign Chemical Waste Requirements Training
  2. Chemical Management for Laboratories
  3. Hydrofluoric Acid Training

After you have completed the exams, please download and save the certificate (PDF) for each completed training, since you will need to upload this to the Materials Research Lab orientation Compass 2g course page.

4. MEET WITH STAFF

Before Fab Approval is given, you must meet with staff to discuss your project. You may need to speak with more than one staff member depending on the scope of your proposed work. You will not be able to request training without Fab Approval.

Open office hours are three times each week:

Wednesday 10 am - 11 am in 380 MRL (Xiaoli Wang: email xlwang84@illinois.edu to confirm)
Wednesday 11 am - 12 noon in 380 MRL (Xiaoli Wang: email xlwang84@illinois.edu to confirm)
Thursday 4:30 pm - 5:30 pm in 380 MRL (Tao Shang)

5. REQUEST CLEANROOM TRAINING

Once Fab approval is given, cleanroom training may be requested using the link: http://cmmserv.mrl.illinois.edu/schedule/login.asp

  1. Under LOGIN: Select the instrument 'Cleanroom' from the drop-down list
  2. Type in your user ID and password, then click the button marked 'Request Training'
  3. In the next page, fill in the responses to questions, then click 'Submit Request'

6. ATTEND CLEANROOM ORIENTATION AND THE PROCESS MODULE LECTURES

Attend a cleanroom orientation session. Orientation sessions are normally scheduled twice a month, from 3-5 PM  (see schedule linked below).

Depending on your cleanroom and microfabrication experience, you may be required to take a short sequence of training modules covering three basic process areas: lithography, deposition, and etching. The training modules will be offered twice a month, following each orientation and are comprised of 1.5-hour lectures.

Microfab Training Requiements

Technique / Required Process Module Lecture(s)

Cleanroom: photolithography / Cleanrom Orientation & Lithography & Etching
Cleanroom: wet chemistry / Cleanroom Orientation & Lithography & Etching
Cleanroom: e-Beam lithography / Cleanroom Orientation & Lithography & Etching
Atomic Layer Deposition (ALD) / Deposition
Vacuum Deposition: e-Beam evaporation / Deposition
Vacuum Deposition: thermal evaporation / Deposition
Vacuum Deposition: sputtering / Deposition
PECVD: Oxide/Nitride deposition / Deposition
Reactive Ion Etching (polymers) / Etching
Reactive Ion Etching (metals) / Etching

No fab process modules are required for: Wire bonding, Diffusion/Annealing furnaces, Optical microscopy, Probe station or Glovebox.

Orientation and Process Module Lecture Schedule

7. OBTAIN CLEANROOM ACCESS AND MASK ALIGNER TRAINING

Once the above requirements have been met, permissions to use the cleanroom will be given. Instructions will be given for obtaining i-card access as well as mask aligner and spin coater training.

The facility is evolving and changes are being made continuously, and thus you may be required to attend further training to keep you up-to-date with the latest procedures and practices in the facility.