Micro/Nanofabrication Instruments

The Micro/Nanofabrication Facility offers:

• Clean Room
• Deposition Tools
• Dry Etching Tools
• Lithography Tools
• Diffusion/Annealing Furnaces
• Bonding Stations
• Probe Stations
• Other Resources

The primary contact for each instrument is the point person for training/inquiries. Please refer to Microfab Staff for secondary contacts.

Clean Room

The class-1000 clean room is more than 1,400-square feet and is housed on the third floor of the MRL. The clean room provides chemicals and equipment for doing lithography and wet chemistry processes for micro structures as well as multi-layer devices.

Primary contact: Bharat Sankaran

Deposition Tools

• Atomic layer deposition (Cambridge Nanotech)
• Thermal Evaporation (Common Wealth Scientific)
• Plasma Enhanced Chemical Vapor Deposition (PE-CVD, PlasmaTherm/Unaxis SLR730)
• ATC 2000 custom four gun Co-sputtering system (AJA International)
• AJA Current Source Configuration
• Temescal six pocket E-Beam Evaporation Systems (quantity 3: Ebeam 1, 2 and 4)
• Temescal four pocket E-Beam Evaporation Systems (quantity 1: Ebeam 3)

Maximum deposition thickness for all E-beam systems is 300 nm. In Ebeam 3, special depositions with film thickness > 300 nm and < 1 µm may be allowed only when approved by Staff. There might be an additional surcharge in these cases.

Primary contact: Bharat Sankaran

Dry Etching Tools

• O₂ Plasma Etch/Asher (LFE)
• 8cm Ion Mill (Common Wealth Scientific)

Primary contact: Mike Marshall/Bharat Sankaran

• Reactive Ion Etch (Unaxis/Plasma Therm)

Primary contact: Bharat Sankaran

Lithography Tools

• Spin Coater Systems (qty. 3)
• MJB3 Mask Aligner (Suss Microtech, quantity 2)
• UV Exposure System (Oriel)

Primary Contact: Bharat Sankaran

• Nano engineering workstation (eLine RAITH)

Primary contact: Mike Marshall

Oxidation/Diffusion/Annealing Furnaces

• 6" Tube oxidation furnace
• 2" Tube oxidation furnace
• 2" Tube Inert gas annealing furnace
• High Temperature CM furnace
• Rapid thermal annealing furnace (Custom)
• Box furnace (quantity 2)

Primary contact: Mike Marshall

Bonding Stations

• 4524 Au Wire Ball Bonder (K&S)
• Al Wire Wedge Bonder (K&S)

Primary contact: Mike Marshall

Probe Stations

• Temperature Controlled Vacuum Probe Station (Lake Shore/Desert Cryo)
• DC Bench Top Probe Station (Custom)
• 4155c Semiconductor Parameter Analyzer (Agilent), used with Lake Shore and custom probe station
• RF-1 Probe Station (Cascade)
• E5062A Network Analyzer (Agilent)

Primary contact: Bharat Sankaran/Mike Marshall

Other Resources

• Optical Microscopes with CCD cameras
• N₂ Glove Box Fabrication System (Mbraun)

Primary contact: Mike Marshall

• Nano Tube Growth furnace (Custom)

Primary contact: Bharat Sankaran/Mike Marshall