Users of the MRL Micro/Nanofabrication Facility have access to a multidisciplinary facility.
The MRL Micro/Nanofabrication Facility is a multidisciplinary, user-supported facility providing equipment and resources for deposition of thin film material and the fabrication of patterned micro- and nano-sized structures, including SQUIDs, MEMs, nanotube, flexible and other multi-layer electronic devices.
The facility operates a 1,400-square foot, class-100 cleanroom with a 400-square foot nano-science cleanroom that is integrated within more than 3,000-square feet of additional instrumentation and tools. The facility provides mulitple high-vacuum PVD and Etching systems combined with high precision optical lithography and e-beam lithography tools capable of 5 nanometer line resolution allowing state of the art pattern delineation and device fabrication.
Cleanroom Facility Layout
Micro/Nanofabrication Facility Supplied Chemicals